Zachary James Davis

TL;DR: In this article, a novel fabrication process and preliminary characterization of a nanomechanical resonating device, which is to be used for mass detection, is reported. But the fabrication of the device is based on laser lithography on Al coated SiO2/p++Si/SiO 2/Si O2/Si structures followed by dry and wet etching.

TL;DR: In this paper, a simple linear electromechanical model for an electrostatically driven resonating cantilever is derived to determine dynamic quantities such as the capacitive current flowing through the cantilevers-driver system at the resonance frequency and calculate static magnitudes such as position and voltage of collapse or the voltage versus deflection characteristic.

TL;DR: In this article, a suspended microchannel resonator (SMR) is used to measure the density and viscosity of viscous solutions with an accuracy of 0.025mPa.

TL;DR: Nanolithography by local anodic oxidation of surfaces using atomic force microscopy (AFM) has proven to be more reproducible when using dynamic, non-contact mode, and thus tip wear is greatly reduced.

TL;DR: In this paper, the authors report on the main aspects of the design, fabrication, and performance of a microelectromechanical system constituted by a mechanical submicrometer scale resonator (cantilever) and the readout circuitry used for monitoring its oscillation through the detection of the capacitive current.