scispace - formally typeset
Search or ask a question
JournalISSN: 1341-8939

Ieej Transactions on Sensors and Micromachines 

Institute of Electrical Engineers of Japan
About: Ieej Transactions on Sensors and Micromachines is an academic journal published by Institute of Electrical Engineers of Japan. The journal publishes majorly in the area(s): Microelectromechanical systems & Surface micromachining. It has an ISSN identifier of 1341-8939. Over the lifetime, 2241 publications have been published receiving 5554 citations. The journal is also known as: Denki Gakkai rombunshi. E, Sensa, maikuromashin jumbumonshi & Transactions of the Institute of Electrical Engineers of Japan. E, A Publication of Sensors and Micromachines Society.


Papers
More filters
PatentDOI
TL;DR: An organic electroluminescent (EL) device consisting of at least one luminescent layer of an organic compound, with the luminescence layer being positioned between a cathode and an anode electrode opposed to the cathode electrode, and an organic layer positioned adjacent to the electrode.
Abstract: An organic electroluminescent (EL) device comprising at least one luminescent layer of an organic compound, the luminescent layer being positioned between a cathode electrode and an anode electrode opposed to the cathode electrode, and an organic layer positioned adjacent to the cathode electrode, in which the organic layer is constituted from an organic metal complex compound containing at least one of alkali metal ions, alkali earth metal ions and rare earth metal ions, and the cathode electrode is constituted from a metal capable of reducing the metal ion in the complex compound, in vacuum, to the corresponding metal. The cathode electrode can be formed from a low cost and stable metal which is well-known as the wiring material. The EL device ensures a diminished energy barrier in an electron injection from the cathode electrode into the luminescent layer, a lowered driving voltage, and a high efficiency and luminescence.

305 citations

Journal ArticleDOI
TL;DR: In this article, a miniaturized fiber-optic pressure sensor 125μm in diameter has been developed for the measurement in human body, which is fabricated by micromachining and attached to the end of an optical fiber using polyimide adhesive layer.
Abstract: A miniaturized fiber-optic pressure sensor 125μm in diameter has been developed for the measurement in human body [1] The sensing element is fabricated by micromachining, and attached to the end of an optical fiber using polyimide adhesive layer A Fabry-Perot interferometer is constituted of a half-mirror at the fiber end and a reflection mirror on the movable thin diaphragm The intensity of the light reflected at the interferometer is modulated by the pressure, because the optical path difference between the two mirrors of the interferometer varies with the displacement of the diaphragm in dependence on the pressure

73 citations

Journal ArticleDOI
TL;DR: In this article, a tensile tester for thin polycrystalline silicon (poly-Si) thin films is presented, which has been constructed in a scanning electron microscope (SEM) chamber.
Abstract: In this paper, a new tensile tester for thin films is presented. This tensile tester has a grip that fixes a thin film specimen using electrostatic force. The tester was constructed in a scanning electron microscope (SEM) chamber. Using this tester, the tensile strengths of polycrystalline silicon (poly-Si) thin films have been measured. The tested part of the specimen is 30-300μm long, 5μm wide and 2μm thick. The fracture of the poly-Si thin film was brittle. The mean tensile strength was 2.0-2.6GPa, depending on the length of the tested part. The size of the critical flaw that initiates fracture of the poly-Si thin film is 28-47nm, rather small than the grain size of the poly-Si thin film.

50 citations

Journal ArticleDOI
TL;DR: The experimental results showed that the driving stress might be caused to the drivers in only 20 minutes by adding more severe driving tasks than normally experienced by the subjects without endangering them.
Abstract: This paper proposes a method for evaluating driver stress using a motor-vehicle driving simulator and a biomarker as an index of stress. Software has been developed, which can deliberately control driving tasks, in addition to analyzing driving information, such as frequency of the use of accelerator and/or brakes and the degree of deviation from the driving course. Sympathetic nervous activity was noninvasively evaluated using a hand-held monitor of salivary amylase activity, which chemically measured a biomarker every few minutes. Using healthy 20 female adults, the appropriateness of the proposed method was evaluated in vivo. The experimental results showed that the driving stress might be caused to the drivers in only 20 minutes by adding more severe driving tasks than normally experienced by the subjects without endangering them. Furthermore, the result indicate that frequent measurements of sympathetic nervous activity were possible without putting the subjects under restraint by using salivary amylase activity as the index.

37 citations

Journal ArticleDOI
TL;DR: In this article, a fabrication technique to realize multiple-height microstructures by locally controlling the etching depth of ICP-RIE (inductively coupled plasma reactive ion etching) was presented.
Abstract: Due to the processing limitation of photolithography, only width and length have been controllable parameters for designing mechanical characteristics of silicon micromachined structures, while thickness has been left pre-determined by the thickness of layers. The range of electromechanical properties have been, therefore, strongly limited by the practical range of these tunable parameters. In this paper, we present a universally applicable fabrication technique to realize multiple-height microstructures by locally controlling the etching depth of ICP-RIE (inductively coupled plasma reactive ion etching). Several layers of etching masks of different materials have been prepared on the initial surface of substrate to avoid repeating photolithography on the etched surfaces. This technique enables us to have one more degree of freedom in designing MEMS structures.

33 citations

Performance
Metrics
No. of papers from the Journal in previous years
YearPapers
202369
2022106
20211
202015
201912
201835