Journal ArticleDOI
124 $^\circ$ Rotation Angle Electrothermal Micromirror With Integrated Platinum Heater
Lei Wu,Huikai Xie +1 more
TLDR
In this article, a single-crystal silicon (SCS)-based micromirror that is electrothermally actuated by a platinum heater integrated at the end of a thermal bimorph actuator is presented.Abstract:
We report a single-crystal silicon (SCS)-based micromirror that is electrothermally actuated by a platinum heater integrated at the end of a thermal bimorph actuator. The mirror size is 1 mm times1 mm. A large rotation angle of 124 deg has been obtained at a dc voltage of 12.5 V. The resonant frequency of the device is 336 Hz. The radius of curvature of the mirror plate is 130 mm. A lumped circuit model has been developed for electrothermomechanical behavioral simulation and design optimization. The simulation results by the circuit model match the experimental data to within 6.9%read more
Citations
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Journal ArticleDOI
MEMS Mirrors for LiDAR: A review.
TL;DR: An extensive overview of Microelectronechanical Systems (MEMS) scanning mirrors specifically for applications in LiDAR systems is presented, and a figure of merit (FoM) is defined for MEMS mirrors inLiDAR scanners in terms of aperture size, field of view (foV) and resonant frequency.
Journal ArticleDOI
A large vertical displacement electrothermal bimorph microactuator with very small lateral shift
Lei Wu,Huikai Xie +1 more
TL;DR: In this article, a novel electrothermal actuator design that can generate large vertical displacements with almost no lateral shift was reported, and the lateral shift free piston motion was achieved by using a unique three-bimorph actuation mechanism.
Journal ArticleDOI
A Millimeter-Tunable-Range Microlens for Endoscopic Biomedical Imaging Applications
Lei Wu,Huikai Xie +1 more
TL;DR: In this paper, an electrothermally-actuated microlens scanner for biomedical imaging applications is presented, which has a large tunable range and low driving voltage, and the lens is made of glass.
Journal ArticleDOI
Electrothermal micromirror with dual-reflective surfaces for circumferential scanning endoscopic imaging
Lei Wu,Huikai Xie +1 more
TL;DR: In this paper, a dual-reflective, single-crystal silicon-based micromirror that can perform circumferential scanning for endoscopic optical coherence tomography (EOCT) is presented.
Journal ArticleDOI
A parametric dynamic compact thermal model of an electrothermally actuated micromirror
Sagnik Pal,Huikai Xie +1 more
TL;DR: In this paper, a compact thermal model of a one-dimensional (1D) electrothermally actuated micromirror device is reported, where thermal bimorphs with integrated platinum resistors are used for generating angular rotation.
References
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Journal ArticleDOI
A two-axis electrothermal micromirror for endoscopic optical coherence tomography
TL;DR: In this paper, a 1-mm/sup 2/2/2 2/3/2-axis, single-crystalline-silicon (SCS)-based aluminum-coated scanning micromirror with large rotation angle (up to 40/spl deg/), which can be used in an endoscopic optical coherence tomography imaging system is presented.
Journal ArticleDOI
Self-aligned vertical electrostatic combdrives for micromirror actuation
TL;DR: In this article, the authors analyze the effect of misalignment in electrostatic combdrives, and describe a fabrication technology that minimizes misalignments by creating self-aligned, vertically staggered electrodes.
Journal ArticleDOI
Three-dimensional optical coherence tomography employing a 2-axis microelectromechanical scanning mirror
Woonggyu Jung,Jun Zhang,Lei Wang,Petra Wilder-Smith,Zhongping Chen,Daniel T. McCormick,Norman C. Tien +6 more
TL;DR: In this article, a 3D optical coherence tomography (OCT) system based on a dual-axis microelectromechanical system (MEMS) mirror is presented, which provides high-speed, high resolution 2-axis scanning while occupying a very small volume with extremely low power consumption.
A 2D Scanner by Surface and Bulk Micromachined Angular Vertical Comb Actuators
TL;DR: In this article, a fully decoupled 2D gimbal scanner with angular vertical comb (AVC) actuators is presented, which is realized by combining a foundry surface-micromachining process (MUMPs) with a 3-mask deep-reactive ionetching (DRIE) post process.
Proceedings ArticleDOI
A SCS CMOS micromirror for optical coherence tomographic imaging
TL;DR: In this article, a single-crystalline silicon (SCS) micromirror is used for laser beam scanning in an endoscopic optical coherence tomography (OCT) system.