Journal ArticleDOI
A High-Precision Dual-Servo Stage Using Halbach Linear Active Magnetic Bearings
Young-Man Choi,Dae-Gab Gweon +1 more
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TLDR
In this article, a dualservo stage with a magnetically levitated fine stage is described, where a Halbach linear active magnetic bearing (HLAMB) has two functions: gravity compensation and actively control of vertical motion.Abstract:
In this paper, a high-precision dual-servo stage with a magnetically levitated fine stage is described. For magnetic levitation, a Halbach linear active magnetic bearing (HLAMB) is used. The HLAMB has two functions: gravity compensation and actively control of vertical motion. To implement these functions, the HLAMB utilizes permanent magnet arrays and Lorentz coils. The fine stage has positioning capabilities with 6 DOF due to four HLAMBs and four voice coil motors (VCM). The HLAMBs control out-of-plane motions, and the VCM control in-plane motions. The fine stage achieves high-precision position feedback using laser interferometers and capacitive sensors. The coarse stage has an H-type structure that can carry the fine stage 300 mm by 300 mm along the x - and y-axes. Positioning and scanning performances are verified by the experimental results. It has ±10 and ±15 nm in-position stability in the x- and y-axes, respectively. At the scan with 10 mm/s constant velocity, ±1 nm mean tracking error and 4.7 nm jitter were obtained.read more
Citations
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Speed-Sensorless Vector Control of a Bearingless Induction Motor With Artificial Neural Network Inverse Speed Observer
TL;DR: In this article, a speed observation scheme using artificial neural network (ANN) inverse method was proposed to effectively reject the influence of speed detection on system stability and precision for a bearingless induction motor.
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Development of a Novel Parasitic-Type Piezoelectric Actuator
TL;DR: In this article, a piezoelectric actuator based on parasitic motion principle is proposed and tested to simultaneously realize coarse (long stroke) and fine (high accuracy) motions using dual-servo control method.
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Development of a Direct-Drive Servo Valve With High-Frequency Voice Coil Motor and Advanced Digital Controller
TL;DR: In this article, a new hydraulic direct-drive valve (DDV) with high-frequency voice coil motor (VCM) and an advanced digital controller is proposed, and the static testing indicates that the discrete-time SMC with unmodeled load compensator improves the control accuracy and robustness of the system.
Journal ArticleDOI
Design and Modeling of a Six-Degree-of-Freedom Magnetically Levitated Positioner Using Square Coils and 1-D Halbach Arrays
TL;DR: An analytical modeling approach is established to accurately predict the Lorentz force generated by the square coil with the 1-D Halbach PM array by considering the corner region, and the proposed modeling approach can be extended easily to apply on other coil designs such as the circular coil.
Journal ArticleDOI
Analysis and Design of Passive Magnetic Bearing and Damping System for High-Speed Compressor
TL;DR: In this article, a magnetic bearing and damping system for a high-speed compressor is proposed, which is composed of a cup-shaped rotor, an axial passive bearing of reluctance type outside the rotor cup, and a passive damper with Halbach magnet array inside the rotor Cup.
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