Journal ArticleDOI
High-precision magnetic levitation stage for photolithography
Won-jong Kim,David L. Trumper +1 more
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In this article, the authors present a high-precision magnetic levitation (maglev) stage for photolithography in semiconductor manufacturing that provides fine six-degree-of-freedom motion controls and realizes large planar motions with only a single magnetically levitated moving part.Abstract:
In this paper, we present a high-precision magnetic levitation (maglev) stage for photolithography in semiconductor manufacturing. This stage is the world’s first maglev stage that provides fine six-degree-of-freedom motion controls and realizes large (50 mm × 50 mm) planar motions with only a single magnetically levitated moving part. The key element of this stage is a linear motor capable of providing forces in both suspension and translation without contact. The advantage of such a stage is that the mechanical design is far simpler than competing conventional approaches and, thus, promises faster dynamic response and higher mechanical reliability. The stage operates with a positioning noise as low as 5 nm rms in x and y , and acceleration capabilities in excess of 1 g (10 m/s 2 ). We demonstrate the utility of this stage for next-generation photolithography or in other high-precision motion control applications.read more
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PatentDOI
Step and flash imprint lithography
TL;DR: In this paper, a method of forming a relief image in a structure comprising a substrate and a transfer layer formed thereon comprises covering the transfer layer with a polymerizable fluid composition, and then contacting the polymerizable fluids composition with a mold having a relief structure formed therein such that the polymerisable fluid composition filled the relief structure in the mold.
Patent
Step and repeat imprint lithography processes
Sidlgata V. Sreenivasan,Byung-Jin Choi,Norman E. Schumaker,Ronald D. Voisin,Michael P. C. Watts,Mario J. Meissl +5 more
TL;DR: In this article, a template is brought into contact with the liquid and the cured liquid includes an imprint of any patterns formed in the template, and the remainder of the substrate is imprinted by moving the template to a different portion of the template and repeating the imprint lithography process.
PatentDOI
Template for room temperature, low pressure micro- and nano-imprint lithography
Byung Jin Choi,Sidlgata V. Sreenivasan,Todd Bailey,Matthew E. Colburn,Carlton G Willson,John G. Ekerdt +5 more
TL;DR: In this article, imprint lithography templates are used to form an imprinted layer in a light curable liquid disposed on a substrate, and during use, the template may be disposed within a template holder.
Patent
Formation of discontinuous films during an imprint lithography process
TL;DR: In this article, the first region is formed from a surface treatment layer with a first surface energy to provide the first wetting characteristics and the second region is exposed portions of the body, typically quartz of fused silica, having a second surface energy associated therewith.
Patent
Step and repeat imprint lithography systems
Sidlgata V. Sreenivasan,Michael P. C. Watts,Byung Jin Choi,Mario J. Meissl,Norman E. Schumaker,Ronald D. Voisin +5 more
TL;DR: In this paper, the imprint lithography system is configured to dispense an activating light curable liquid onto a substrate or template, and the system includes a light source that applies activating light to cure the activating light-curable liquid.
References
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Design of permanent multipole magnets with oriented rare earth cobalt material
TL;DR: In this article, a special emphasis is put on quadrupoles because of their frequent use and because the aperture fields achievable (1.2-1.4 T) are rather large.
Proceedings ArticleDOI
Design and analysis framework for linear permanent magnet machines
TL;DR: In this paper, the authors present a design and analysis framework for the general class of permanent magnet electric machines, including surface-mounted linear motors consisting of permanent magnets and ironless current-carrying coils.
Journal ArticleDOI
Modeling and control of a six degree-of-freedom magnetic/fluidic motion control stage
TL;DR: A six degree of freedom positioning stage for fine motion control that is suitable for positioning a sample with better than atomic resolution and visioned applications include producing the scanning motions required in scanned probe microscopy or as a motion control stage for integrated circuit metrology.
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