A new four states high deflection low actuation voltage electrostatic MEMS switch for RF applications
Renaud Robin,Salim Touati,Karim Segueni,Olivier Millet,Lionel Buchaillot +4 more
- pp 56-59
TLDR
In this paper, a new electrostatic MEMS (MicroElectroMechanical System) based on a single high reliability totally free flexible membrane using four electrodes, this structure enables four states which allowed large deflections (4 mum) with low actuation voltage (7,5 V) This design presents also a good contact force and improves the restoring force of the structure.Abstract:
This paper presents a new electrostatic MEMS (MicroElectroMechanical System) based on a single high reliability totally free flexible membrane Using four electrodes, this structure enables four states which allowed large deflections (4 mum) with low actuation voltage (7,5 V) This design presents also a good contact force and improves the restoring force of the structure As an example of application, a Single Pole Double Throw (SPDT) for 24 GHz applications, based on this design, has been simulatedread more
Citations
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RF MEMS SWITCH: An overview at- a-glance
TL;DR: The RF MEMS switch has emerged as a frontrunner for its high level of RF performance, while maintaining ultra-low-power dissipation and large-scale integration.
Journal ArticleDOI
Analysis and optimization of two movable plates RF MEMS switch for simultaneous improvement in actuation voltage and switching time
TL;DR: An attempt to overcome the existing limitations of RF MEMS switch like high actuation voltage and low switching time simultaneously has been addressed by introducing the concept of moving bottom plate (CPW central line).
Proceedings Article
RF MEMS SWITCH: An overview at- a-glance
TL;DR: The RF MEMS switch has emerged as a frontrunner for its high level of RF performance, while maintaining ultra-low-power dissipation and large-scale integration as mentioned in this paper, and the main advantage of this technology is that the devices can be manufactured by processes similar to that of VLSI and has helped in the realization of many sub millimeter sized parts to provide RF functionality.
Proceedings ArticleDOI
Low Actuation Voltage SPDT RF MEMS K Band Switch using a Single Gold Membrane
TL;DR: In this paper, the SPDT (Single Pole Double Throw) system for K band applications using RF MEMS (Radio-Frequency MicroElectroMechanical Systems) switch is presented.
Journal ArticleDOI
Performance improvement of RF MEMS switch with two movable plates
TL;DR: In this paper, a novel design and analysis of RF MEMS switch with two movable electrodes to achieve a simultaneous improvement in actuation voltage along with the switching time is presented.
References
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Book
Vibration problems in engineering
TL;DR: In this article, the Probleme dynamique and Vibration were used for propagation of ondes reference records created on 2004-09-07, modified on 2016-08-08.
Proceedings ArticleDOI
Low actuation voltage totally free flexible RF MEMS switch with antistiction system
Salim Touati,Nicolas Lorphelin,Alexandre Kanciurzewski,Renaud Robin,Anne-Sophie Rollier,Olivier Millet,Karim Segueni +6 more
TL;DR: A new design of RF MEMS switch combined with an innovative process which enable low actuation voltage (<5 V) and avoid stiction and results of anti-stiction validation is detailed.
Proceedings ArticleDOI
Force Coupled Electrostatic RF MEMS SP3T Switch
TL;DR: In this paper, an electrostatic RF MEMS SP3T switch using axial force coupling is proposed, where three switching membranes are coupled through flexible beams so that the deflection of one switching membrane develops mutual axial load and moment to the others (one in already ON state and the other in idle state) and helps them easily be OFF.
Proceedings ArticleDOI
A Totally Free Flexible Membrane: A Design for Low Electrostatic Actuation MEMS
K. Segueni,A.-S. Rollier,L. Le Garrec,R. Robin,S. Touati,A. Kanciurzewski,L. Buchaillot,Olivier Millet +7 more
TL;DR: In this article, a totally free flexible membrane was proposed for low actuation voltage and more reliable mechanical behavior in terms of induced stress and environmental constraints for low electrostatic actuation.