Journal ArticleDOI
Atmospheric pressure microplasma jet as a depositing tool
Reads0
Chats0
TLDR
In this article, an atmospheric pressure microplasma jet is developed for depositing homogeneous thin films from C2H2, and the adjustment of the gas flow through the microplasmas jet assures optimal flow conditions as well as minimizes deposition inside the jet.Abstract:
An atmospheric pressure microplasma jet is developed for depositing homogeneous thin films from C2H2. The adjustment of the gas flow through the microplasma jet assures optimal flow conditions as well as minimizes deposition inside the jet. In addition, the formation of an argon boundary layer surrounding the emerging plasma beam separates the ambient atmosphere from the flow of growth precursor. Thereby the incorporation of nitrogen and oxygen from the ambient atmosphere into the deposited film is suppressed. Soft polymerlike hydrogenated amorphous carbon (a-C:H) films are deposited at the rate of a few nm/s on the area of a few square millimeters.read more
Citations
More filters
Journal ArticleDOI
Microplasmas for nanomaterials synthesis
TL;DR: Microplasmas have attracted a tremendous amount of interest from the plasma community because of their small physical size, stable operation at atmospheric pressure, non-thermal characteristics, high electron densities and non-Maxwellian electron energy distributions as discussed by the authors.
Journal ArticleDOI
Microplasmas: sources, particle kinetics, and biomedical applications
Felipe Iza,Felipe Iza,Gon Jun Kim,Seung Min Lee,Jae Koo Lee,James L. Walsh,Yuantao T. Zhang,Michael G. Kong +7 more
TL;DR: In this article, a review of existing microplasma sources and charged particle kinetics in various microdischarges is presented, and an outlook is presented on the biomedical application of microplasmas.
Journal ArticleDOI
Cold atmospheric pressure air plasma jet for medical applications
Juergen F. Kolb,Abdel-Aleam H. Mohamed,R.O. Price,R.J. Swanson,Angela M. Bowman,R. L. Chiavarini,Michael W. Stacey,Karl H. Schoenbach +7 more
TL;DR: In this article, a 2 cm long plasma jet was generated by flowing atmospheric pressure air through a direct current powered microhollow cathode discharge, which was used to eliminate yeast infections of the skin.
Journal ArticleDOI
Three distinct modes in a cold atmospheric pressure plasma jet
TL;DR: In this paper, it is shown that immediately following breakdown, the plasma jet operates in a deterministic chaotic mode, and with increasing input power, the discharge becomes periodic and the jet plasma is found to produce at least one strong plasma bullet every cycle of the applied voltage.
Journal ArticleDOI
Mechanisms of bacterial inactivation in the liquid phase induced by a remote RF cold atmospheric pressure plasma jet
TL;DR: In this paper, the role of different active components of the argon plasma is evaluated based on either measurements, as mentioned above, or estimations based on published data of measurements of those components.
References
More filters
Journal ArticleDOI
Microplasmas and applications
TL;DR: The microplasmas are generated under conditions that promote the efficient production of transient molecular species such as the rare gas excimers, which generally are formed by three-body collisions as mentioned in this paper.
Journal ArticleDOI
Absolute atomic oxygen density measurements by two-photon absorption laser-induced fluorescence spectroscopy in an RF-excited atmospheric pressure plasma jet
TL;DR: In this paper, absolute atomic oxygen density measurements by two-photon absorption laser-induced fluorescence (TALIF) spectroscopy in the jet effluent were performed with the aid of a comparative TALIF measurement with xenon.
Journal ArticleDOI
Deposition of silicon dioxide films with an atmospheric-pressure plasma jet
TL;DR: In this article, a plasma jet was developed which deposits silica films at up to at 760 Torr and 115 to C. The jet operates by feeding oxygen and helium gas between two coaxial electrodes, driven by a 13.56 MHz radio frequency source at 40 to 500 W. Tetraethoxysilane is mixed with the effluent of the plasma jet and directed onto a substrate located 1.7 cm downstream.
Journal ArticleDOI
Design and preliminary characterization of a miniature pulsed RF APGD torch with downstream injection of the source of reactive species
TL;DR: In this article, a miniature low-power atmospheric pressure glow discharge torch (APGD-t) was designed and the results of its preliminary electrical and spectroscopic characterization were presented.
Journal ArticleDOI
Localized and ultrahigh-rate etching of silicon wafers using atmospheric-pressure microplasma jets
TL;DR: A miniaturized very high-frequency driven inductively coupled plasma jet source has been developed for the production of high-temperature and high-density plasmas in a small space, and its application to the localized and ultrahigh-rate etching of silicon wafers has been studied as discussed by the authors.
Related Papers (5)
Room-temperature atmospheric pressure plasma plume for biomedical applications
Mounir Laroussi,Xinpei Lu +1 more