Journal ArticleDOI
Batch mode micro-electro-discharge machining
TLDR
In this paper, a micro-electro-discharge machining (micro-EDM) technique that uses electrode arrays to achieve high parallelism and throughput in the machining is described.Abstract:
This paper describes a micro-electro-discharge machining (micro-EDM) technique that uses electrode arrays to achieve high parallelism and throughput in the machining. It explores constraints in the fabrication and usage of high aspect ratio LIGA-fabricated electrode arrays, as well as the limits imposed by the pulse discharge circuits on machining rates. An array of 400 Cu electrodes with 20 /spl mu/m diameter was used to machine perforations in 50-/spl mu/m-thick stainless steel. To increase the spatial and temporal multiplicity of discharge pulses, arrays of electrodes with lithographically fabricated interconnect and block-wise independent pulse control resistance-capacitance (RC) circuits are used, resulting in >100/spl times/ improvement in throughput compared to single electrodes. However, it was found to compromise surface smoothness. A modified pulse generation scheme that exploits the parasitic capacitance of the interconnect offers similarly high machining rates and is more amenable to integration. Stainless steel workpieces of 100 /spl mu/m thickness were machined by 100 /spl mu/m/spl times/100 /spl mu/m square cross-section electrodes using in 85 s using an 80-V power supply. Surface smoothness was unaffected by electrode multiplicity. Using electrode arrays with four circuits, batch production of 36 WC-Co gears with 300 /spl mu/m outside diameter and 70 /spl mu/m thickness in 15 min is demonstrated.read more
Citations
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Journal ArticleDOI
State of the Art of Micromachining
TL;DR: In this article, the authors summarized the basic concepts and applications of major methods of micromachining and discussed the basic characteristics of each group of methods based on different machining phenomena.
Journal ArticleDOI
Advancing EDM through fundamental insight into the process
TL;DR: In this paper, the authors show the prospects of electrical discharge machining (EDM) technology by interrelating recent achievements in fundamental studies on EDM with newly developed advanced application technologies.
Journal ArticleDOI
Micro electrochemical milling
TL;DR: In this article, a disc-type electrode was introduced to reduce the taper of the machining depth and 3D micro structures including a hemisphere with 60 µm diameter were fabricated by electrochemical milling.
Journal ArticleDOI
Machining of micro/miniature dies and moulds by electrical discharge machining—Recent development
TL;DR: An overview on the state of the art of applicable micro-electrical discharge machining technologies for applications in the field of micro/miniature die and mold making can be found in this article.
Journal ArticleDOI
Materials for microfabricated implantable devices: a review
Kee Scholten,Ellis Meng +1 more
TL;DR: The consequence of material choice as it pertains to microfabrication and biocompatibility is discussed in detail with a particular focus on the divide between hard, rigid materials and soft, pliable polymers.
References
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Journal ArticleDOI
Wire Electro-Discharge Grinding for Micro-Machining
TL;DR: In this paper, a new method, WEDG (wire electro-discharge grinding), for EDM'ing very thin rods is proposed, where travelling wire is used as the tool electrode.
Proceedings ArticleDOI
Micro electro-discharge machining and its applications
T. Masaki,K. Kawata,T. Masuzawa +2 more
TL;DR: A micro electro-discharge machining (MEDM) technology is presented in this article, which allows machining of micro holes and shafts as small as 5 mu m in diameter with a best surface roughness of 1 mu m R/sub max/ and of roundness of 05 mu m.
Journal ArticleDOI
High-aspect-ratio WC-Co microstructure produced by the combination of LIGA and micro-EDM
TL;DR: In this article, a high-aspect-ratio WC-Co (tungsten carbide super hard alloy) microstructure has been produced by a new microfabrication process which combines LIGA and micro-EDM (electro-discharge machining).
Proceedings ArticleDOI
LIGA process: sensor construction techniques via X-ray lithography
TL;DR: The LIGA (from the German Lithographie, Galvanoformung, Abformung) method, based on deep-etch X-ray lithography, electroforming and molding processes, is described in this paper.
Proceedings ArticleDOI
Microelectro discharge machining as a technology in micromachining
TL;DR: In this article, the results of a microfabrication of an optical fiber connector using Electro Discharge Machining (EDM) technology are presented, which has been fabricated by EDM in close cooperation between the Institute of Microtechnology Mainz GmbH and the Swiss EDM-manufacturer AGIE Losone.