Patent
Beam shaping and projection imaging with solid state uv gaussian beam to form vias
Corey M. Dunsky,Xinbing Liu,Nicholas J. Croglio,Ho Wai Lo,Bryan C. Gundrum,Hisashi Matsumoto +5 more
TLDR
In this article, a diode-pumped solid-state laser (52) of a laser system (50) provides ultraviolet Gaussian output (54) that is converted by a diffractive optical element (90) into shaped output (94) having a uniform irradiance profile.Abstract:
A diode-pumped, solid-state laser (52) of a laser system (50) provides ultraviolet Gaussian output (54) that is converted by a diffractive optical element (90) into shaped output (94) having a uniform irradiance profile. A high percentage of the shaped output (94) is focused through an aperture of a mask (98) to provide imaged shaped output (118). The laser system (50) facilitates a method for increasing the throughput of a via drilling process over that available with an analogous clipped Gaussian laser system. This method is particularly advantageous for drilling blind vias (20b) that have better edge, bottom, and taper qualities than those produced by a clipped Gaussian laser system. An alternative laser system (150) employs a pair of beam diverting galvanometer mirrors (152, 154) that directs the Gaussian output around a shaped imaging system (70) that includes a diffractive optical element (90) and a mask (98). Laser system (150) provides a user with the option of using either a Gaussian output or an imaged shaped output (118).read more
Citations
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Patent
Laser-based method and system for memory link processing with picosecond lasers
Bo Gu,Donald V. Smart,James J. Cordingley,Joohan Lee,Donald J. Svetkoff,Shepard D. Johnson,Jonathan S. Ehrmann +6 more
TL;DR: In this paper, a laser-based method of removing a target link structure of a circuit fabricated on a substrate includes generating a pulsed laser output at a pre-determined wavelength less than an absorption edge of the substrate.
Patent
Laser beam delivery system with trepanning module
Todd E. Lizotte,Orest Ohar +1 more
TL;DR: In this paper, a laser beam delivery system for supplying a laserbeam to a computer generated hologram which shapes and divides the supplied laser beam into a plurality of pseudo flat top laser beams is presented.
Patent
Method for patterning a multilayered conductor/substrate structure
Kourosh Kian,Ramin Heydarpour +1 more
TL;DR: In this article, a projection-type excimer laser system is employed to rapidly and precisely ablate a pattern from a mask into the at least one conductive layer, and the fluence of the excimer is controlled in consideration of an ablation threshold level.
Patent
Processing a memory link with a set of at least two laser pulses
TL;DR: In this article, a set of laser pulses (52 ) is employed to sever a conductive link in a memory or other IC chip, and the duration of the set (50 ) is preferably shorter than 1,000 ns; and the pulse width of each laser pulse ( 52 ) within the set( 50 ) is within a range of about 0.1 ps to 30 ns.
Patent
Laser ablation method and apparatus having a feedback loop and control unit
Peter Delfyett,Richard Stoltz +1 more
TL;DR: In this article, a probe is used to measure an indicative property of the ablation target or of the pulsed laser projected on the target, which is then used to optimize ablation effect by generating a feedback signal according to the measured indicative property.
References
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PatentDOI
Geometrical transformations in optics
TL;DR: In this paper, the authors introduce phase filters having a predetermined phase function into optical coherent systems in such a manner that the local phase variations influence light from local object areas, where the object distribution is multiplied by the phase function so that its spectrum at the frequency plane constitutes the desired transformation.
Patent
Ultraviolet laser system and method for forming vias in multi-layered targets
Mark D. Owen,James N. O'brien +1 more
TL;DR: In this paper, the output of a continuously pumped, Q-switched, Nd:YAG laser (10) is frequency converted to provide ultraviolet light for forming vias (72, 74) in multi-layered targets (40).
Patent
Method employing UV laser pulses of varied energy density to form depthwise self-limiting blind vias in multilayered targets
TL;DR: In this article, the output of a continuously pumped, Q-switched, Nd:YAG laser is converted to provide ultraviolet light for forming vias in targets (40) having metallic layers (64,68) and a dielectric layer (66).
Patent
Optical beam homogenizer
TL;DR: An optical beam homogenizer divides and redirects an incident beam to provide uniform irradiation to a plane surface as mentioned in this paper, which is useful for metal hardening, semiconductor annealing, or other materials processing applications.
Journal ArticleDOI
Kinoform phase plates for focal plane irradiance profile control.
TL;DR: A versatile, rapidly convergent, iterative algorithm is presented for the construction of kinoform phase plates for tailoring the far-field intensity distribution of laser beams that contains more than 95% of the incident energy inside a desired region and is relatively insensitive to beam aberrations.