Patent
Beam shaping and projection imaging with solid state uv gaussian beam to form vias
Corey M. Dunsky,Xinbing Liu,Nicholas J. Croglio,Ho Wai Lo,Bryan C. Gundrum,Hisashi Matsumoto +5 more
TLDR
In this article, a diode-pumped solid-state laser (52) of a laser system (50) provides ultraviolet Gaussian output (54) that is converted by a diffractive optical element (90) into shaped output (94) having a uniform irradiance profile.Abstract:
A diode-pumped, solid-state laser (52) of a laser system (50) provides ultraviolet Gaussian output (54) that is converted by a diffractive optical element (90) into shaped output (94) having a uniform irradiance profile. A high percentage of the shaped output (94) is focused through an aperture of a mask (98) to provide imaged shaped output (118). The laser system (50) facilitates a method for increasing the throughput of a via drilling process over that available with an analogous clipped Gaussian laser system. This method is particularly advantageous for drilling blind vias (20b) that have better edge, bottom, and taper qualities than those produced by a clipped Gaussian laser system. An alternative laser system (150) employs a pair of beam diverting galvanometer mirrors (152, 154) that directs the Gaussian output around a shaped imaging system (70) that includes a diffractive optical element (90) and a mask (98). Laser system (150) provides a user with the option of using either a Gaussian output or an imaged shaped output (118).read more
Citations
More filters
Patent
Automated polarization correction
TL;DR: A chirped pulse amplification system includes one or more polarization compensators configured to compensate for polarization altering elements with the Chirped Pulse Amplification System (CPAS) as discussed by the authors.
Patent
Ultraviolet laser ablative patterning of microstructures in semiconductors
Brian W. Baird,Michael J. Wolfe,Richard S. Harris,Kevin P. Fahey,Lian-Cheng Zou,Thomas R. Mcneil +5 more
TL;DR: In this paper, the laser output pulses (32) from a diode-pumped, Q-switched frequency-tripled Nd:YAG, Nd-YVO4, or Nd :YLF are directed to the workpiece (12) with high speed precision using a compound beam positioner.
Patent
Laser-based system for memory link processing with picosecond lasers
Bo Gu,Donald V. Smart,James J. Cordingley,Joohan Lee,Donald J. Svetkoff,Shepard D. Johnson,Jonathan S. Ehrmann +6 more
TL;DR: In this article, a laser-based system for processing target material within a microscopic region without causing undesirable changes in electrical or physical characteristics of at least one material surrounding the target material, the system includes a seed laser, an optical amplifier, and a beam delivery system.
Patent
Method for laser singulation of chip scale packages on glass substrates
TL;DR: In this article, an improved method for singulation of compound electronic devices using laser processing has been presented, which provides fewer defects such as cracking or chipping of the substrates while minimizing the width of the kerf and maintaining system throughput.
Patent
Ophthalmic laser treatment apparatus
TL;DR: An ophthalmic laser treatment apparatus for treating an eye including an irradiation unit including a laser source, and a scanner for scanning irradiation spots from the laser source onto a tissue of the eye in two dimensions is described in this paper.
References
More filters
PatentDOI
Geometrical transformations in optics
TL;DR: In this paper, the authors introduce phase filters having a predetermined phase function into optical coherent systems in such a manner that the local phase variations influence light from local object areas, where the object distribution is multiplied by the phase function so that its spectrum at the frequency plane constitutes the desired transformation.
Patent
Ultraviolet laser system and method for forming vias in multi-layered targets
Mark D. Owen,James N. O'brien +1 more
TL;DR: In this paper, the output of a continuously pumped, Q-switched, Nd:YAG laser (10) is frequency converted to provide ultraviolet light for forming vias (72, 74) in multi-layered targets (40).
Patent
Method employing UV laser pulses of varied energy density to form depthwise self-limiting blind vias in multilayered targets
TL;DR: In this article, the output of a continuously pumped, Q-switched, Nd:YAG laser is converted to provide ultraviolet light for forming vias in targets (40) having metallic layers (64,68) and a dielectric layer (66).
Patent
Optical beam homogenizer
TL;DR: An optical beam homogenizer divides and redirects an incident beam to provide uniform irradiation to a plane surface as mentioned in this paper, which is useful for metal hardening, semiconductor annealing, or other materials processing applications.
Journal ArticleDOI
Kinoform phase plates for focal plane irradiance profile control.
TL;DR: A versatile, rapidly convergent, iterative algorithm is presented for the construction of kinoform phase plates for tailoring the far-field intensity distribution of laser beams that contains more than 95% of the incident energy inside a desired region and is relatively insensitive to beam aberrations.