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Journal ArticleDOI

Beam spot diameter of the near-field scanning electron microscopy

TLDR
It is deduced that the sharpness of the tip is important not only for creating high extraction fields but also for guaranteeing a very small beam spot diameter.
About
This article is published in Ultramicroscopy.The article was published on 2013-02-01. It has received 22 citations till now. The article focuses on the topics: Beam diameter & Beam (structure).

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Citations
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Derivation of a generalized Fowler-Nordheim equation for nanoscopic field-emitters

TL;DR: In this paper, a generalized FowlerNordheim (FN) type equation was derived analytically from first principles for the curvature of a nanoscopic emitter and applied to the case of a single photon.
Journal ArticleDOI

A general computational method for electron emission and thermal effects in field emitting nanotips

TL;DR: In this article, the authors present a computational method for the calculation of emission currents and Nottingham heat, which automatically distinguishes among different emission regimes, and implements the appropriate calculation method for each, aiming to maximize the calculation accuracy while minimizing the computational time.
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Extension of the general thermal field equation for nanosized emitters

TL;DR: In this paper, the standard image corrected triangular potential barrier was used for planar surfaces and therefore cannot be used in general for modern nanometric emitters, and the authors showed that the standard Fowler-Nordheim theory can be generalized for highly curved emitters if a quadratic term is included to the potential model.
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Extension of the General Thermal Field Equation for nanosized emitters

TL;DR: In this article, the standard image corrected triangular potential barrier model was used to describe electron emission from metals both in the field and thermionic regimes, as well as in the transition region.
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Use of model-based library in critical dimension measurement by CD-SEM

TL;DR: In this article, the SE signal profile shape in critical dimension (CD) metrology by CD-SEM is modeled for the simulation of SE linescans, and the sensitivity of the SE intensity profiles to the different topographic parameters are investigated.
References
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Journal ArticleDOI

A WKB-Type Approximation to the Schrödinger Equation

TL;DR: In this article, a method of approximating solutions of the one-dimensional Schr\"odinger equation is presented, which closely resembles the usual WKB approximation and is illustrated by treating the potential well and potential barrier problems when there are two turning points.
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Nonequilibrium molecular vibrons: An approach based on the nonequilibrium Green function technique and the self-consistent Born approximation

TL;DR: In this paper, the authors considered the nonequilibrium quantum vibrations of a molecule clamped between two macroscopic leads in a current-carrying state at finite voltages.
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Use of energy-space diagrams in free-electron models of field electron emission

TL;DR: In this paper, an improved method for deriving the equations for cold field electron emission from a free-electron metal was presented, where the derivation of these equations can be presented as a straightforward double integral in a space where the vertical axis represents the total electron energy, and the horizontal axis represented the component of electron kinetic energy parallel to the emitter surface.
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Development of Fowler-Nordheim theory for a spherical field emitter

TL;DR: In this article, the Fowler-Nordheim (F-N) theory has been extended to use a potential distribution approximating that outside a hemisphere supported on a shank, instead of planar field as widely used hitherto.
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Self focusing of field emitted electrons at an ellipsoidal tip

TL;DR: In this paper, the needle is terminated with a hemiellipsoidal cap and used a three-dimensional Wentzel-Kramers-Brillouin method for the computations.
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