Proceedings ArticleDOI
Change of characteristic length with packaging for torsional MEMS switch
Deepak Bansal,Anuroop,Prem Kumar,Maninder Kaur,Surender P. Gaur,Prateek Kothari,Arvind Singh,Kamaljit Rangra +7 more
- Vol. 1724, Iss: 1, pp 020030
TLDR
In this article, the authors derived the effective characteristic length with reference to the packaging height of an open MEMS device and modified it with the packaging cavity height to obtain the gap between the MEMS bridge and underneath actuation electrodes.Abstract:
Fluid continuity theory is used to describe the dynamic response of open Micro-Electro-Mechanical-System (MEMS) devices. For a packaged device, at low pressure, the fluid continuity theory is no longer valid and a rarefication theory based on a Knudsen number is used. In an open MEMS device, the characteristic length which determines the Knudsen number is represented by the gap between the MEMS bridge and underneath actuation electrodes. On the other hand, for a packaged device, effective characteristic length is modified with the packaging cavity height. In this paper, for a packaged MEMS device, effective characteristic length with reference to the packaging height is derived.read more
References
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Molecular Gas Dynamics and the Direct Simulation of Gas Flows
TL;DR: The direct simulation Monte Carlo (or DSMC) method has, in recent years, become widely used in engineering and scientific studies of gas flows that involve low densities or very small physical dimensions as mentioned in this paper.
Journal ArticleDOI
Report: a model for flows in channels, pipes, and ducts at micro and nano scales
Ali Beskok,George Em Karniadakis +1 more
TL;DR: In this paper, a general boundary condition that accounts for the reduced momentum and heat exchange with wall surfaces is proposed and its validity is investigated and it is shown that it is applicable in the entire Knudsen range and is second-order accurate in Kn in the slip flow regime.
Journal ArticleDOI
RF MEMS switches and switch circuits
TL;DR: In this paper, the authors concentrate on electrostatic switches at 0.1-100 GHz with high reliability (100 million to 10 billion cycles) and wafer-scale manufacturing techniques.
Journal ArticleDOI
Dependence of the quality factor of micromachined silicon beam resonators on pressure and geometry
TL;DR: In this article, an experimental study of damping and frequency of vibrating small cantilever beams in their lowest eigenstate is presented, where the authors obtain design rules for sensors employing vibrating beams.
Journal ArticleDOI
Mass flow and tangential momentum accommodation in silicon micromachined channels
TL;DR: In this paper, the tangential momentum accommodation coefficient (TMAC) for several gases in contact with single-crystal silicon was found to be less than unity, ranging from 0.75 to 0.85.