Patent
Dual-flexure light valve
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TLDR
In this paper, a dual-flexure pixel design is proposed to maintain well-defined diffraction nodes at or near the projection aperture edges over the full modulation range, achieving high image contrast.Abstract:
A spatial light modulator pixel includes a flexible reflective surface that is electrostatically actuated to control the surface shape and thereby phase-modulate reflected light. The reflected light is filtered by a projection aperture, wherein the phase modulation controls the amount of light from the pixel that is filtered through the aperture. The spatial light modulator includes and array of such pixels, which are imaged onto a conjugate image plane, and each pixel controls the image brightness at a corresponding conjugate image point. High image contrast is achieved by using a dual-flexure pixel design in which two flexure elements operate conjunctively to maintain well-defined diffraction nodes at or near the projection aperture edges over the full modulation range.read more
Citations
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References
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Patent
Deformable mirror light modulator
TL;DR: In this paper, a light modulator consisting of a light-reflective metallized membrane defining a deformable mirror disposed over a semiconductor substrate of one conductivity type in which a matrix array of field effect transistors are formed, the metallised membrane cooperating with a matrix of floating metallic field plate members disposed on an insulating layer covering the substrate to define an array of air gap capacitors for line addressing by the field effect address transistors.
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TL;DR: In this article, a plurality of elongated elements are suspended with their respective ends substantially coplanar in a first plane and in a second plane, they are electrically coupled for receiving a second bias voltage.
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TL;DR: In this article, a surface deformation light modulator contains a plurality of first electrodes arranged in a matrix of p rows and q columns affixed to a substrate by a suitable means.
Journal ArticleDOI
Maskless extreme ultraviolet lithography
Neha Choksi,D. S. Pickard,Mark A. McCord,Roger Fabian W. Pease,Yashesh Shroff,Yijian Chen,William G. Oldham,D. A. Markle +7 more
TL;DR: In this article, the mask of a current EUV system is replaced by an array of micron-sized mirrors and patterns are achieved by modulating individual mirrors to create selected bright and dark spots.
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Electron gun activated grating light valve
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