Open AccessJournal Article
Effect of N_2 Flow Rate on Structure and Property of CrN Coatings Deposited by DC Reactive Magnetron Sputtering
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TLDR
In this paper, the effect of N 2 flow rate on microstructure, surface morphology, hardness and bonding force of the chromium nitride (CrN) coating was studied.Abstract:
Chromium nitride(CrN) coating was deposited by DC reactive magnetron sputtering.The effect of N_2 flow rate on microstructure,surface morphology,hardness and bonding force of the CrN coating was studied. The results show that when N_2 flow rate changed from 30%to 100%,the coating was mainly composed of CrN phase.With the increase of N_2 flow rate the grain shape of CrN coatings changed from pyramidal to the coexistence pyramidal and spheroidal topography,and the coatings became denser,which led to the improvement of the hardness.The effect of N_2 flow rate on bonding force of the coating was weak.read more
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Journal ArticleDOI
Effect of N2 Flow Rate on Structure and Mechanical Properties of CrN Coatings Prepared by Closed Field Unbalanced Magnetron Sputtering
TL;DR: In this article, the effect of N2 flow rate on composition, phase components, morphologies and mechanical properties of CrN coatings were studied, and the results showed that the deposition rate of the CrN coating declined with the increase of nitrogen flow percentage in a Ar/N2 mixture atmosphere.
Journal ArticleDOI
Effect of Temperature on Structure and Mechanical Properties of CrN Coatings Deposited by Closed Field Unbalanced Magnetron Sputtering
TL;DR: In this article, the effect of substrate temperature on phase components, morphologies and mechanical properties of columnar crystal CrN coatings were studied and the results showed that the phase in coatings, which has little to do with TS, was the coexistence of Cr, Cr2N and CrN.