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Proceedings ArticleDOI

Fabrication of thick zone plates for multi-kilovolt X-rays

A. Düvel, +2 more
- Vol. 507, Iss: 1, pp 607-614
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TLDR
In this article, phase zone plates for multi-kilovolt X-rays with an outermost zone width of 169-30 nm and aspect ratios up to 177 were generated by a sputtered-sliced technology.
Abstract
Phase zone plates for multi-kilovolt X-rays with an outermost zone width of 169-30 nm and aspect ratios up to 177 were generated by a sputtered-sliced technology The generated lenses of alternating Ni80Cr20 and SiO2 consist of 188–365 layers on borosilicate glass wires and were polished by mechanical and ion processes to a thickness of 3–4 μm without carrier foil The groove efficiency was measured at the ESRF beamline ID 21 up to 38% in first order But small parts of a zone plate show an efficiency of about 10–15%

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Citations
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Journal ArticleDOI

Hard x-ray nanofocusing by multilayer Laue lenses

TL;DR: A comprehensive review of advances in multilayer Laue lens (MLL) is provided in this paper, which includes extensive theoretical modelling on focusing performance, discussion on fabrication challenges, their current capabilities and notable results from x-ray focusing experiments.
Journal ArticleDOI

Three-dimensional structured on-chip stacked zone plates for nanoscale X-ray imaging with high efficiency

TL;DR: In this article, the authors developed triple layer on-chip stacked zone plates with an overlay accuracy of sub-2 nm which fulfills the nanofabrication requirements of X-ray optics.
Journal ArticleDOI

Influence of random zone positioning errors on the resolving power of Fresnel zone plates

TL;DR: It is found that random errors significantly decrease the contrast transfer of X-ray microscopes and an upper bound for the mean acceptable variance of the deposition rate is derived.
Journal ArticleDOI

X-ray microscopy

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