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Journal ArticleDOI

Frequency dependence of a quartz oscillator on gas pressure

TLDR
In this paper, the frequency shifts of a tuning fork-shaped quartz oscillator with gas pressure were studied experimentally and theoretically and the experimental measurements showed that the frequency shift of the oscillator was very small in the pressure region below 1 Torr and much larger in the higher pressure region above 1 torr.
Abstract
The frequency shifts of a tuning‐fork‐shaped quartz oscillator with gas pressure were studied experimentally and theoretically. The experimental measurements showed that the frequency shift of the oscillator was very small in the pressure region below 1 Torr and much larger in the higher pressure region above 1 Torr. The experimental results were theoretically analyzed on the basis of a string‐of‐beads model for a quartz oscillator. The theoretical analysis showed that the resonance frequency shift of the quartz oscillator was small in the molecular flow region. In the viscous flow region the frequency shift was found to be proportional to the pressure. These theoretical results are in good agreement with the experimental data. The frequency shift of the oscillator in the higher pressure region was also found to be proportional to the molecular weight of the gas species in both theory and experiment.

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Journal ArticleDOI

Survey of quartz bulk resonator sensor technologies

TL;DR: The term 'bulk resonator' is used to include a variety of vibrational modes, namely thickness shear, single-endedflexural, double-ended flexural, and torsional, which are broken down by type of resonant mode.
Journal ArticleDOI

Attachment loss of micromechanical and nanomechanical resonators in the limits of thick and thin support structures

TL;DR: In this paper, analytical expressions for the energy loss from vibrating mechanical resonators into their support structures for two limiting cases: supports that can be treated as plates, and supports that act as semi-infinite elastic media, with effectively infinite thickness.
Journal ArticleDOI

Limits to mode-localized sensing using micro- and nanomechanical resonator arrays

TL;DR: In this article, the authors investigated the limits to sensitivity enhancement imposed on the vibration mode-localized sensors, by some of the fundamental physical noise processes, the bandwidth of operation and the noise from the electronic interfacial circuits.
Journal ArticleDOI

Analysis of Bloch’s Method in Structures with Energy Dissipation

TL;DR: In this paper, a general framework for applying Bloch analysis in such systems is presented in which the approach is applied to example phononic crystals, and the results reveal the manner in which damping affects dispersion and the presence of band gaps in periodic systems.
Journal ArticleDOI

Resonant silicon structures

TL;DR: In this article, the authors proposed a method to solve the SAMLAB-ARTICLE-1989-002 problem by using SAMLAB's SAMLABARTICLE 1989-002 abstract.
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