Journal ArticleDOI
High-Fill-Factor Micromirror Array With Hidden Bimorph Actuators and Tip–Tilt-Piston Capability
TLDR
In this article, a novel high-fill-factor micromirror array (MMA) actuated by electrothermal bimorphs is presented, which can directly be surface mounted onto driving circuit chips or printed circuit boards after fabrication.Citations
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Journal ArticleDOI
MEMS Laser Scanners: A Review
TL;DR: In this paper, the requirements on MEMS laser scanners for demanding display applications, performance levels of the best scanners in the published literature, and the advantages and disadvantages of electrostatic, electromagnetic, piezoelectric, and mechanically coupled actuation principles are reviewed.
Journal ArticleDOI
A review of micromirror arrays
TL;DR: A review of micromirror array (MMA) technologies can be found in this paper, where the performance capabilities of 277 MMAs from 49 companies and 23 academic research groups are categorized and compared.
Journal ArticleDOI
A Large Piston Displacement MEMS Mirror With Electrothermal Ladder Actuator Arrays for Ultra-Low Tilt Applications
Sean R. Samuelson,Huikai Xie +1 more
TL;DR: In this article, a large displacement piston motion micromirror is designed, fabricated, and tested with device features tuned to applications requiring ultralow tilt, achieving a strongly linear motion of 90 μm achievable at only 1.2 V.
Journal ArticleDOI
A 2.8-mm Imaging Probe Based On a High-Fill-Factor MEMS Mirror and Wire-Bonding-Free Packaging for Endoscopic Optical Coherence Tomography
TL;DR: A miniature optical coherence tomography (OCT) probe and high-resolution 3D OCT imaging results obtained with this probe, enabled by a unique high-fill-factor electrothermal MEMS mirror with hidden actuators and a novel wire-bonding-free (WBF) packaging technique are reported.
Journal ArticleDOI
A Two-Dimensional MEMS Scanning Mirror Using Hybrid Actuation Mechanisms With Low Operation Voltage
Kah How Koh,Chengkuo Lee +1 more
TL;DR: In this article, a hybrid-driven CMOS-compatible 2D raster scanning mirror based on hybrid actuation mechanisms is presented. But the authors focus on the low-power biasing condition.
References
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Journal ArticleDOI
A MEMS-based projection display
TL;DR: The digital display engine (DDE) as discussed by the authors is based on a single DMD device having array dimensions of 800/spl times/600 elements, illuminated by a metal halide arc lamp through a compact optics train.
Journal ArticleDOI
A Review of Phased Array Steering for Narrow-Band Electrooptical Systems
Paul F. McManamon,Philip J. Bos,Michael J. Escuti,Jason Heikenfeld,Steve Serati,Huikai Xie,Edward A. Watson +6 more
TL;DR: Multiple nonmechanical steering approaches are developing that will allow high-efficiency steering, excellent steering accuracy, and wide fields of view, similar to microwave radar phased arrays.
A Review of Phased Array Steering for Narrow-Band Electrooptical Systems Rapid, accurate, non-mechanical techniques for steering optical beams can provide the kind of efficient random access pointing offered by microwave radars.
Paul F. McManamon,Philip J. Bos,Michael J. Escuti,Jason Heikenfeld,Steve Serati,Huikai Xie,Edward A. Watson +6 more
TL;DR: In this paper, the authors compared the performance of the combined liquid crystal and step-steering approach with a variable birefringent grating approach and compared it with the conventional liquid crystal approach.
Journal ArticleDOI
Gimbal-less monolithic silicon actuators for tip-tilt-piston micromirror applications
TL;DR: In this article, the authors demonstrate a fully monolithic silicon optical scanner with large static optical beam deflection, which can be used for both one-and two-axis rotation and pistoning of a micromirror.
Journal ArticleDOI
An Electrothermal Tip–Tilt–Piston Micromirror Based on Folded Dual S-Shaped Bimorphs
Kemiao Jia,Sagnik Pal,Huikai Xie +2 more
TL;DR: In this article, an electrothermally actuated tip-tilt-piston micromirror with a large optical aperture of 1 mm was designed and tested for biomedical imaging and laser beam steering.
Related Papers (5)
An Electrothermal Tip–Tilt–Piston Micromirror Based on Folded Dual S-Shaped Bimorphs
Kemiao Jia,Sagnik Pal,Huikai Xie +2 more