Journal ArticleDOI
Laser‐induced fluorescence measurement of plasma ion temperatures: Corrections for power saturation
Matthew Goeckner,John Goree +1 more
TLDR
In this article, the authors used high power pulsed tunable dye laser to measure plasma ion temperatures and found that the fluorescence linewidth of room temperature ions broadens from 1.50 to 2.87 GHz when the homogeneous laser intensity is increased from 50 kW/m2 to 5 MW/m 2.Abstract:
When using high‐power pulsed tunable dye lasers to measure plasma ion temperatures, it is important to attenuate the laser intensity. The temperature is found from the Doppler broadening of a spectral line. This may be obscured by saturation broadening, an instrumental effect encountered when too much laser intensity is used. Three useful experimental methods for determining the optimum pulsed laser intensity are found from a semiclassical atomic physics model. As an example, an Ar II transition pumped by a 1‐GHz bandwidth laser is examined. The fluorescence linewidth of room‐temperature ions broadens from 1.50 to 2.87 GHz when the homogeneous laser intensity is increased from 50 kW/m2 to 5 MW/m2.read more
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Journal ArticleDOI
Dry Etching of Electronic Oxides, Polymers, and Semiconductors
TL;DR: A review of commonly used plasma etching techniques and typical plasma chemistries for patterning electronic oxides, such as SiO2, HfO 2, MgO, Sc2O3, and ZnO, polymers, and several important semiconductors (Si, GaAs, and InP) is given in this paper.
Journal ArticleDOI
Measurements of ion velocity and density in the plasma sheath
TL;DR: Using laser-induced fluorescence, the ion velocity and density inside a dc plasma sheath have been measured using a planar electrode, biased at −100 V, where a laser beam struck it at normal incidence as mentioned in this paper.
Journal ArticleDOI
Laser induced fluorescence in Ar and He plasmas with a tunable diode laser
R. F. Boivin,E. E. Scime +1 more
TL;DR: In this article, a diode laser based laser induced fluorescence (LIF) diagnostic system was developed on the hot helicon experiment (HELIX) plasma device, where a narrow band interference filter was used to eliminate all but the plasma radiation in the immediate vicinity of the fluorescence wavelength.
Journal ArticleDOI
Neutral density profiles in argon helicon plasmas
Amy Keesee,Earl Scime +1 more
TL;DR: In this paper, a collisional-radiative model was used to calculate excited state profiles based on measured electron densities, electron temperatures, and measured edge neutral pressure, and the ground state neutral density profile was determined for each pressure case.
Journal ArticleDOI
Laser-induced fluorescence characterization of a multidipole filament plasma
TL;DR: In this paper, a multidipole filament discharge was characterized using sub-Doppler laser-induced fluorescence (LIF) and the ion temperature was found to be Ti=0.028±0.007 eV, measured in the center of an argon discharge.