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Journal ArticleDOI

Laser‐induced fluorescence measurement of plasma ion temperatures: Corrections for power saturation

Matthew Goeckner, +1 more
- 01 May 1989 - 
- Vol. 7, Iss: 3, pp 977-981
TLDR
In this article, the authors used high power pulsed tunable dye laser to measure plasma ion temperatures and found that the fluorescence linewidth of room temperature ions broadens from 1.50 to 2.87 GHz when the homogeneous laser intensity is increased from 50 kW/m2 to 5 MW/m 2.
Abstract
When using high‐power pulsed tunable dye lasers to measure plasma ion temperatures, it is important to attenuate the laser intensity. The temperature is found from the Doppler broadening of a spectral line. This may be obscured by saturation broadening, an instrumental effect encountered when too much laser intensity is used. Three useful experimental methods for determining the optimum pulsed laser intensity are found from a semiclassical atomic physics model. As an example, an Ar II transition pumped by a 1‐GHz bandwidth laser is examined. The fluorescence linewidth of room‐temperature ions broadens from 1.50 to 2.87 GHz when the homogeneous laser intensity is increased from 50 kW/m2 to 5 MW/m2.

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Journal ArticleDOI

Dry Etching of Electronic Oxides, Polymers, and Semiconductors

TL;DR: A review of commonly used plasma etching techniques and typical plasma chemistries for patterning electronic oxides, such as SiO2, HfO 2, MgO, Sc2O3, and ZnO, polymers, and several important semiconductors (Si, GaAs, and InP) is given in this paper.
Journal ArticleDOI

Measurements of ion velocity and density in the plasma sheath

TL;DR: Using laser-induced fluorescence, the ion velocity and density inside a dc plasma sheath have been measured using a planar electrode, biased at −100 V, where a laser beam struck it at normal incidence as mentioned in this paper.
Journal ArticleDOI

Laser induced fluorescence in Ar and He plasmas with a tunable diode laser

TL;DR: In this article, a diode laser based laser induced fluorescence (LIF) diagnostic system was developed on the hot helicon experiment (HELIX) plasma device, where a narrow band interference filter was used to eliminate all but the plasma radiation in the immediate vicinity of the fluorescence wavelength.
Journal ArticleDOI

Neutral density profiles in argon helicon plasmas

TL;DR: In this paper, a collisional-radiative model was used to calculate excited state profiles based on measured electron densities, electron temperatures, and measured edge neutral pressure, and the ground state neutral density profile was determined for each pressure case.
Journal ArticleDOI

Laser-induced fluorescence characterization of a multidipole filament plasma

TL;DR: In this paper, a multidipole filament discharge was characterized using sub-Doppler laser-induced fluorescence (LIF) and the ion temperature was found to be Ti=0.028±0.007 eV, measured in the center of an argon discharge.
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