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Proceedings ArticleDOI

Manufacturing challenges and method of fabrication of on-chip capacitive digital isolators

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TLDR
In this paper, a robust and innovative method of fabrication of on-chip capacitive digital isolators integrated in a high precision analog CMOS process is presented, where several dielectric materials such as TEOS, HDP, silicon nitride, silicon oxynitride, with different film stresses were evaluated for this capacitor in order to achieve the high breakdown voltage (RMS and surge) requirements of the isolation capacitor while ensuring wafer manufacturability.
Abstract
A robust and innovative method of fabrication of on-chip capacitive digital isolators integrated in a high precision analog CMOS process is presented in this paper Several dielectric materials such as TEOS, HDP, silicon nitride, silicon oxynitride, with different film stresses were evaluated for this capacitor in order to achieve the high breakdown voltage (RMS and surge) requirements of the isolation capacitor while ensuring wafer manufacturability Impact of various integration schemes and combinations of the dielectric layers on the capacitor breakdown voltage performance along with a package and wafer-level reliability assessment of these integration schemes is discussed

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Citations
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Proceedings ArticleDOI

Highly Integrated Galvanically Isolated Systems for Data/Power Transfer

TL;DR: Main research aims such as the improvement of the isolation rating, data rate, isolated power level and power efficiency, along with the isolator size and cost will be considered.
Proceedings ArticleDOI

A Compact 6 ns Propagation Delay 200 Mbps $100\ \text{kV}/\mu \mathrm{s}$ CMR Capacitively Coupled Direction Configurable 4-Channel Digital Isolator in Standard CMOS

TL;DR: A small-size on-chip capacitively coupled 4-channel direction-configurable digital isolator in standard CMOS technology is proposed to achieve high noise immunity and post simulation shows that the proposed architecture achieves 200 Mbps data rate.
Proceedings ArticleDOI

25.4 A 500Mb/s 200pJ/b die-to-die bidirectional link with 24kV surge isolation and 50kV/µs CMR using resonant inductive coupling in 0.18µm CMOS

TL;DR: An isolation technique is proposed where two standard 180nm CMOS dies placed side by side with DTI of more than 500µm, and co-packaged using regular planar MCM flow with package mold compound being the isolation material, achieve asynchronous bidirectional link with >24kV surge isolation capability and greater than 500Mb/s at 175pJ/b.
Book ChapterDOI

Reinforced Galvanic Isolation: Integrated Approaches to Go Beyond 20-kV Surge Voltage (invited)

TL;DR: Two approaches for data and power transfer are discussed, which exploit the RF coupling between two isolated interfaces, while packaging/assembling techniques are used to guarantee high galvanic isolation.
Journal ArticleDOI

Novel TCAD Approach for the Investigation of Charge Transport in Thick Amorphous SiO 2 Insulators

TL;DR: In this article, a TCAD approach for the investigation of charge transport in amorphous silicon dioxide is presented for the first time, where the role of charge injection at contacts and charge build-up due to trapping-detrapping mechanisms in the bulk of the oxide layer has been investigated and modeled to the purpose of understanding the oxide behavior under dc-and ac-stress conditions.
References
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Journal ArticleDOI

Integrated transformer-coupled isolation

TL;DR: The iCoupler technology as mentioned in this paper is a chip-scale transformer technology that minimizes the design burden associated with the use of isolation, and it has been shown to improve the performance of isolation devices.
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