Proceedings ArticleDOI
Mechanical characteristics of LTCC (Low Temperature Cofired Ceramics) -tapes for mechanical application
Michael Unger,Walter Smetana,W. Ehrenzweig +2 more
- pp 59-64
TLDR
In this article, various LTCC-tapes of different suppliers have been evaluated concerning their mechanical properties which are required for finite-element analyses (FEA) in order to design mechanical operating sensors.Abstract:
Various LTCC-tapes of different suppliers have been evaluated concerning their mechanical properties which are required for finite-element-analyses (FEA) in order to design mechanical operating sensors. Bending tests on fired tape samples have been conducted in order to investigate the influence of processing conditions, applied metallization as well as geometrical parameters on the mechanical characteristics. Additionally piezo-resistive thick-film sensors have been applied onto the LTCC-beam elements to correlate bending stress with the sensor signal.read more
Citations
More filters
Journal ArticleDOI
A Wireless Embedded Resonant Pressure Sensor Fabricated in the Standard LTCC Technology
TL;DR: In this article, the authors proposed a fully embedded resonant pressure sensor operating in the MHz range and realized in the standard low-temperature co-fired ceramics (LTCC) technology.
Journal ArticleDOI
Manufacturing and Characterization of a Deformable Membrane with Integrated Temperature Sensors and Heating Structures in Low Temperature Co-fired Ceramics
TL;DR: In this article, the authors describe the manufacturing process of a deformable mirror for the wave front correction of a high energy laser using low temperature co-fired ceramic (LTCC) membrane.
Journal ArticleDOI
Influence of lamination parameters on mechanical properties of low temperature co-fired ceramic tapes
TL;DR: The results can be used to determine the proper LTCC tape material, the lamination pressure and the number of layers to allow the development of customized force sensors, not only for musical wind instruments.
Proceedings ArticleDOI
LTCC membranes With integrated heating structures, temperature sensors and strain gauges
TL;DR: In this paper, the authors describe the manufacturing process of a deformable mirror for the wave front correction of a high energy laser, which must endure several postfire processes at temperatures of up to 900°C without any degradation of the sensors' characteristics.
Technological investigation of LTCC-based Micro-Electro-Mechanical Systems (MEMS) to improve reliability and accuracy
TL;DR: In this article, the shrinkage and material properties of differently structured LTCC substrates based on the material system GT951 as a function of various technological fabrication parameters are investigated, and the intention behind is to control the behavior of the MEMS component precisely during different steps of the manufacturing process.
References
More filters
Book
Mechanical behavior of materials
TL;DR: In this paper, the second-rank tensors of a tensor were modeled as tensors and they were used to model the deformation of polycrystalline materials and their properties.
Book
Mechanical Behavior of Materials
TL;DR: In this article, a course focused on the experimental study of mechanical behavior of engineering materials is presented, where the theoretical background and techniques used for testing are extensively discussed in class, alongside the lab sessions.