Journal ArticleDOI
Power absorption in electrically asymmetric dual frequency capacitive radio frequency discharges
TLDR
In this paper, the authors investigated the power absorbed by the electrons Pe as a function of θ and time experimentally, by a particle in cell simulation, and an analytical model.Abstract:
The symmetry of capacitive radio frequency discharges can be controlled via the electrical asymmetry effect by driving one electrode with a fundamental frequency and its second harmonic. In such electrically asymmetric discharges, the mean ion energies at both electrodes are controlled separately from the ion flux by tuning the phase angle θ between the harmonics at fixed voltage amplitudes. Here, the question why the ion flux is nearly independent of θ is answered by investigating the power absorbed by the electrons Pe as a function of θ and time experimentally, by a particle in cell simulation, and an analytical model. The dynamics of Pe is understood by the model and is found to be strongly affected by the choice of θ. However, on time average, Pe is nearly constant, independently of θ. Thus, the ion flux remains approximately constant. In addition, it is shown that the absolute value of the individual voltages across the powered and grounded electrode sheath vary linearly with the dc self-bias. Howeve...read more
Citations
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Journal ArticleDOI
Tailored-waveform excitation of capacitively coupled plasmas and the electrical asymmetry effect
TL;DR: The electrical asymmetry effect (EAE) as discussed by the authors has been studied in the field of capacitively coupled plasmas (CCP) and is well known to generate an asymmetric plasma response and a DC self bias voltage.
Journal ArticleDOI
The electrical asymmetry effect in capacitively coupled radio-frequency discharges
TL;DR: In this article, an analytical model to describe capacitively coupled radio-frequency discharges and the electrical asymmetry effect (EAE) based on the non-linearity of the boundary sheaths is presented.
Journal ArticleDOI
Electron heating in capacitively coupled plasmas revisited
TL;DR: In this article, a method for quantifying the level of collisionless and collisional heating in plasma simulations is proposed based on the electron mechanical energy conservation equation, which is demonstrated with particle-in-cell simulations of a number of single and multi-frequency CCPs operated in regimes of research and industrial interest.
Journal ArticleDOI
Control of plasma properties in capacitively coupled oxygen discharges via the electrical asymmetry effect
Edmund Schüngel,Quan-Zhi Zhang,Shinya Iwashita,Julian Schulze,Julian Schulze,Lu-Jing Hou,You-Nian Wang,Uwe Czarnetzki +7 more
TL;DR: In this article, a dual-frequency voltage source of 13.56 MHz and 27.12 MHz is applied to the powered electrode and the discharge symmetry is controlled by adjusting the phase angle θ between the two harmonics.
Journal ArticleDOI
Control of the ion flux and ion energy in CCP discharges using non-sinusoidal voltage waveforms
Trevor Lafleur,Jean-Paul Booth +1 more
TL;DR: In this paper, a characterization of the ion flux and ion energy in a capacitively coupled rf plasma reactor excited with non-sinusoidal voltage waveforms was performed using particle-in-cell simulations.
References
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Book
Principles of Plasma Discharges and Materials Processing
TL;DR: In this paper, the authors introduce the concept of particle and energy balance in discharges and introduce the theory of collision dynamics and wave-heated discharges, as well as chemical reactions and equilibrium.
Journal ArticleDOI
The application of scattering cross sections to ion flux models in discharge sheaths
TL;DR: In this paper, consistent sets of Ar++Ar and Ar+++Ar differential and integral cross sections for modeling ion scattering that take into account differential scattering data and the fact that symmetric charge transfer collisions are one aspect of elastic scattering collisions are presented.
Journal ArticleDOI
On the possibility of making a geometrically symmetric RF-CCP discharge electrically asymmetric
TL;DR: In this paper, the authors proposed to use the phase-locked fundamental and its second harmonic to balance the charged particle fluxes in a dual-frequency discharge, which can be used to increase or decrease the ion energy striking a substrate while leaving the applied RF voltage and frequency unchanged.
Journal ArticleDOI
Independent control of ion current and ion impact energy onto electrodes in dual frequency plasma devices
TL;DR: In this article, the authors use particle-in-cell simulations to show that the most important governing parameter is the ratio of the driving frequencies of the high and low frequencies of a dual-frequency capacitive discharge.