Journal ArticleDOI
Sandwich-type ferromagnetic RF integrated inductor
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TLDR
In this article, the first demonstration of a sandwich-type ferromagnetic RF integrated spiral inductor for the 2 GHz range is reported, and the inductance L of 7.9 nH and the qualify factor Q of 12.7 were obtained for a 200 /spl mu/m/spl times/400 /splmu/m size four-turn rectangular spiral at f=2 GHz.Abstract:
The first demonstration of a sandwich-type ferromagnetic RF integrated spiral inductor for the 2-GHz range is reported. Two ferromagnetic CoNbZr films were set to sandwich the spiral in order to enhance the amount of magnetic flux linkage across the coil current. The stresses given from the insulator to the ferromagnetic film were studied. The inductance L of 7.9 nH and the qualify factor Q of 12.7 were obtained for a 200 /spl mu/m/spl times/400 /spl mu/m size four-turn rectangular spiral at f=2 GHz. The inductance was better than that of an air core of the same coil size by 19%, and the Q was better by 23%. Comparison with the on-top magnetic film type was also discussed.read more
Citations
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References
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Journal ArticleDOI
Microfabrication and characteristics of magnetic thin-film inductors in the ultrahigh frequency region
Masahiro Yamaguchi,K. Suezawa,Ken Ichi Arai,Yukio Takahashi,Shinki Kikuchi,Yutaka Shimada,Weidong Li,S. Tanabe,K. Ito +8 more
TL;DR: In this paper, a thin-film inductor for 1 GHz-drive mobile communication handset application has been demonstrated in a 370 μm×370 μm square four turn spiral of line/space with 0.1-μm-thick slitted Fe61Al13O26 film with Cr underlayer.
Proceedings ArticleDOI
High frequency (GHz) and low resistance integrated inductors using magnetic materials
TL;DR: In this article, a 3-dimensional structure for reducing the inductor's resistance by an order of magnitude was developed, and simulations of inductors with magnetics and measurements were presented.
Journal ArticleDOI
Application of bi-directional thin-film micro wire array to RF integrated spiral inductors
TL;DR: In this paper, vertical and horizontally aligned micro wire arrays with the magnetic hard axis perpendicular to the length of the wire are micro-fabricated from zero-magnetostrictive CoNbZr film and Annealing produced a 180-degree domain pattern, small coercive force and good permeability.
Proceedings ArticleDOI
Fabrication of high-performance on-chip suspended spiral inductors by micromachining and electroless copper plating
TL;DR: In this paper, polysilicon spiral inductors encapsulated with copper (Cu) were suspended over 30-spl mu/m-deep cavities in the silicon substrate and the metallization process simultaneously coated the inner surfaces of the cavities with Cu to form both good radiofrequency (RF) ground and electromagnetic shield.
Proceedings ArticleDOI
Magnetic RF integrated thin-film inductors
Masahiro Yamaguchi,M. Baba,K. Suezawa,T. Moizumi,Ken Ichi Arai,Yutaka Shimada,A. Haga,S. Tanabe,K. Ito +8 more
TL;DR: In this article, a magnetic thin film inductor with a 4-turn, 337/spl times/337 /spl mu/m/sup 2/size spiral coil was proposed.