Journal ArticleDOI
Soft x-ray microscope constructed with a PMMA phase-reversal zone plate
Jong Ju Park,Deuk Su Kim,Sang Chul Jeon,Juyun Park,Kyoung Hwan Lee,Jae-hwan Lee,Ki Nam Kim,Jung Jae Yoo,Chang Hee Nam +8 more
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TLDR
A soft x-ray microscope based on a phase-reversal zone plate was constructed and tested using high harmonic radiation as a coherent light source and showed that the measured resolution of the microscope was better than 100 nm.Abstract:
A soft x-ray microscope based on a phase-reversal zone plate was constructed and tested using high harmonic radiation as a coherent light source. The 61st harmonic centered at 13.3 nm was optimized in spectral sharpness and intensity by controlling the incident laser energy and chirp. A phase-reversal zone plate made of polymethyl methacrylate more than doubled the first-order efficiency. The nano patterns, imaged on an x-ray CCD with a magnification of 650, showed that the measured resolution of the microscope was better than 100 nm.read more
Citations
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Journal ArticleDOI
Ultrafast direct imaging using a single high harmonic burst.
TL;DR: This zone-plate-based microscopy system delivered real-space images directly without any data processing, demonstrating ultrafast direct soft x-ray microscopy imaging.
Journal ArticleDOI
A desktop extreme ultraviolet microscope based on a compact laser-plasma light source
Przemyslaw Wachulak,Alfio Torrisi,Andrzej Bartnik,Łukasz Węgrzyński,Tomasz Fok,Henryk Fiedorowicz +5 more
TL;DR: In this paper, a desktop size microscope, based on laser-plasma source and equipped with reflective condenser and diffractive Fresnel zone plate objective, operating in the extreme ultraviolet (EUV) region at the wavelength of 13.8nm, was developed.
Journal ArticleDOI
Monochromatizing and focussing femtosecond high-order harmonic radiation with one optical element
TL;DR: An optimized realization of a dedicated beam line for femtosecond pulses from high-order harmonic generation with an off-axis reflection zone plate based on a 3D Gaussian model is proposed.
Proceedings ArticleDOI
Application of actinic mask review system for the preparation of HVM EUV lithography with defect free mask
Jihoon Na,Donggun Lee,Changhwan Do,Hong-seok Sim,Jung-Hwan Lee,Jungyoup Kim,Hwan-Seok Seo,Hee-Bom Kim,Chan-Uk Jeon +8 more
TL;DR: In this paper, an extreme ultraviolet lithography (EUVL) mask defect review system (EMDRS) is proposed to verify either mask repair or mask defect avoidance by actinic reviews of defect images before and after the process.
Proceedings ArticleDOI
Table-top soft x-ray microscope adopting a PMMA phase-reversal zone plate
Jong Ju Park,Deuk Su Kim,Sang Chul Jeon,Juyun Park,Kyoung Hwan Lee,Jae-hwan Lee,Ki Nam Kim,Jung Jae Yoo,Chang Hee Nam +8 more
TL;DR: In this paper, a table-top soft x-ray microscope, adopting a phase-reversal zone plate (PRZP) made of PMMA and high harmonic X-ray source, was constructed.
References
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