The 2022 Plasma Roadmap: low temperature plasma science and technology
Igor Adamovich,Shivansh Agarwal,Eduardo Ahedo,Luís Alves,Scott D. Baalrud,N.Yu. Babaeva,Annemie Bogaerts,Alex Bourdon,Peter Bruggeman,Casey Canal,E. H. Choi,S. Coulombe,Zoltan Donko,David B. Graves,Shoki Hamaguchi,Dirk Hegemann,Mikito Hori,H. Kim,Gmw Kroesen,Mark J. Kushner,Annarita Laricchiuta,X. Li,Thierry Magin,S. Mededovic Thagard,V. Miller,Anthony B. Murphy,Gottlieb S. Oehrlein,Nevena Puač,R. Mohan Sankaran,Seiji Samukawa,Masaharu Shiratani,M. Šimek,Nikolai Tarasenko,Katsutomo Terashima,E. Thomas Jr,Jan Trieschmann,Sedina Tsikata,Miles M. Turner,Izak J. van der Walt,Mauritius C. M. van de Sanden,Thomas von Woedtke +40 more
- Vol. 55, Iss: 37, pp 373001-373001
TLDR
The latest edition of the Journal of Physics D's "Plasma Roadmap" as discussed by the authors was published with the intent to identify important outstanding challenges in the field of low-temperature plasma (LTP) physics and technology.Abstract:
The 2022 Roadmap is the next update in the series of Plasma Roadmaps published by Journal of Physics D with the intent to identify important outstanding challenges in the field of low-temperature plasma (LTP) physics and technology. The format of the Roadmap is the same as the previous Roadmaps representing the visions of 41 leading experts representing 21 countries and five continents in the various sub-fields of LTP science and technology. In recognition of the evolution in the field, several new topics have been introduced or given more prominence. These new topics and emphasis highlight increased interests in plasma-enabled additive manufacturing, soft materials, electrification of chemical conversions, plasma propulsion, extreme plasma regimes, plasmas in hypersonics, data-driven plasma science and technology and the contribution of LTP to combat COVID-19. In the last few decades, LTP science and technology has made a tremendously positive impact on our society. It is our hope that this roadmap will help continue this excellent track record over the next 5–10 years.read more
Citations
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Grand challenges in low temperature plasmas
TL;DR: In this paper , the challenges in the field of low temperature plasmas (LTPs) are discussed with a focus on health, energy, and sustainability, and the authors discuss the challenges being faced in particular for atmospheric pressure Plasmas.
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Foundations of atomic-level plasma processing in nanoelectronics
Karsten Arts,Satoshi Hamaguchi,Tomoko Ito,Kazuhiro Karahashi,Harm C. M. Knoops,Adriaan J. M. Mackus,W. M. M. (Erwin) Kessels +6 more
TL;DR: In this paper , the surface reaction mechanisms of PE-ALE and PE-ALD are discussed, including the role of transport of ions and radicals, including their surface reaction probabilities and ion-energy-dependent threshold effects in processing over HAR features such as deep holes and trenches.
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Science-based, data-driven developments in plasma processing for material synthesis and device-integration technologies
Makoto Kambara,Satoru Kawaguchi,Hae June Lee,Kazumasa Ikuse,Satoshi Hamaguchi,Takeshi Ohmori,A. Ishikawa +6 more
TL;DR: In this review, the requirements and challenges for plasma parameter prediction and processing recipe discovery are asserted by researchers in the fields of material science and plasma processing and a science-based, data-driven approach for development of virtual metrology in plasma processes is outlined.
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Nitrogen Fixation by an Arc Plasma at Elevated Pressure to Increase the Energy Efficiency and Production Rate of NOx
TL;DR: In this article , the authors investigated the use of a rotating gliding arc plasma for nitrogen fixation at elevated pressures (up to 3 barg), at different feed gas flow rates and composition.
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Low temperature plasma-assisted synthesis and modification of water splitting electrocatalysts
TL;DR: In this article , the development and application of low temperature plasma technology in the synthesis and modification of electrocatalytic materials for water electrolysis is highlighted, which is expected to provide reference for the design and research of electrode materials in electrocalytic water splitting with plasma-assisted technologies.
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Book
The Fourth Paradigm: Data-Intensive Scientific Discovery
TL;DR: This presentation will set out the eScience agenda by explaining the current scientific data deluge and the case for a “Fourth Paradigm” for scientific exploration.
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