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Thin film transistor and method of manufacturing the same, and flat panel display device having thin film transistor

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TLDR
In this paper, the authors proposed a thin film transistor that uses an oxide semiconductor as an active layer, and provided a method of manufacturing the same, and to provide a flat panel display device having the thin-film transistor.
Abstract
PROBLEM TO BE SOLVED: To provide a thin film transistor that uses an oxide semiconductor as an active layer, to provide a method of manufacturing the same, and to provide a flat panel display device having the thin film transistor. SOLUTION: The thin film transistor includes: an oxide semiconductor layer formed on a substrate and having a channel region, a source region, and a drain region; a gate electrode insulated from the oxide semiconductor layer by a gate insulating layer; an ohmic contact layer formed on the source region and the drain region of the oxide semiconductor layer; and a source electrode and a drain electrode respectively coupled to the source region and the drain region through the ohmic contact layer, wherein the ohmic contact layer is formed of a metal having a lower work function than work functions of the source electrode and the drain electrode. COPYRIGHT: (C)2010,JPO&INPIT

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References
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Thin-film transistor

TL;DR: In this paper, a thin film transistor with a ZnO film as active layer is presented, which suppresses a leak current of a gate insulating film and obtains good transistor characteristics.
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Organic electroluminescent display device

TL;DR: An organic electroluminescent display device includes at least a driving TFT and pixels which are formed by organic EH elements and are provided on a substrate of the TFT.
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Semiconductor devices utilizing amorphous oxide

TL;DR: In this paper, a semiconductor device consisting of a P-type region and an N-type area is presented. But the electron mobility increases with the electron carrier concentration as the electron density increases.
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Thin film transistor array, method for manufacturing the same, and liquid crystal display device

TL;DR: In this article, the oxide semiconductor film is exposed through the opening to reducing plasma or plasma containing doping elements to simultaneously decrease the resistance in the connection terminals 18, 17, the source-drain parts 15, 16 and the pixel electrode 13.
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TL;DR: In this article, the authors proposed a thin-film transistor with sufficient transistor characteristics and using an organic semiconductor material in which costs for an electrode material are low, where the source and drain electrodes are respectively composed of at least a contact part contacting with the semiconductor layer and a non-contact part other than the contact part.
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