Journal ArticleDOI
TiO2 Film Properties as a Function of Processing Temperature
TLDR
In this paper, annealing in air caused crystallization, with anatase formed beginning at 350°C and rutile at 700°C, while the density and index of refraction increased with increasing anneal temperature, while etch susceptibility in and decreased.Abstract:
Thin film was produced at 150°C by chemical vapor deposition using hydrolysis of tetraisopropyl titanate. Films were amorphous as grown, but annealing in air caused crystallization, with anatase formed beginning at 350°C and rutile at 700°C. Density and index of refraction increased substantially with increasing anneal temperature, while etch susceptibility in and decreased. Comparison with literature data showed two groups of processes. One group yields films having properties that gradually approach those of rutile with increasing process temperature. The other group gives rutile directly at moderate temperatures. Deposition of amorphous film, followed by etching and annealing is suggested as a means for pattern definition.read more
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Semiconductor-Based Composite Materials: Preparation, Properties, and Performance
TL;DR: In this paper, the authors highlight the advances that have been made and identify some of the gaps in our current knowledge of these materials and discuss size quantization effects and semiconductor quantum dots.
Journal ArticleDOI
Nucleation and growth in TiO2 films prepared by sputtering and evaporation
P. Löbl,M. Huppertz,D. Mergel +2 more
TL;DR: In this article, the influence of the process parameters on the optical properties of TiO2 films, such as index of refraction, scattering of light, and absorption, is discussed.
Journal ArticleDOI
Growth of titanium dioxide thin films by atomic layer epitaxy
TL;DR: In this paper, a TiCl4 and water as reactants were used to grow a thin titanium dioxide thin film over a temperature range 150-600 °C in order to study the effects of temperature on the growth rate.
Journal ArticleDOI
Electronic Properties of the Interface between Si and TiO2 Deposited at Very Low Temperatures
TL;DR: In this article, the electronic properties of a TiO2/Si interface were analyzed in detail using metal-insulator-semiconductor structures and the minimum interface state density in the bandgap was as low as 2×1011 cm-2 eV-1.
Journal ArticleDOI
Single-material TiO2 double-layer antireflection coatings
TL;DR: In this paper, a double-layer antireflection (DLAR) coating can be fabricated using a single material, titanium dioxide (TiO2) The optical properties of the top and bottom TiO2 layers were controlled by varying the deposition and sintering conditions, resulting in a range of refractive indices.
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