What are the current research gaps in understanding the effects of radio frequency sputtering on material properties?
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The current research gaps in understanding the effects of radio frequency sputtering on material properties include the need for further investigation into the comparison between high impulse magnetron sputtering (HiPIMS) and radio frequency (RF) sputtering processes in terms of material properties such as resistivity, crystallinity, absorption coefficient, band gap, and refractive index . Additionally, there is a need to explore the optimal sputtering conditions for specific materials, such as zinc selenide (ZnSe) and niobium (Nb), to achieve films of excellent quality with improved mechanical properties . Furthermore, the effects of RF sputtering power on the structural, optical, and electrical properties of thin films, such as NiO and SiO2, need to be further investigated . Overall, more research is needed to fully understand the impact of radio frequency sputtering on different materials and to optimize the sputtering conditions for specific applications.
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