E
E. J. Rymaszewski
Researcher at Rensselaer Polytechnic Institute
Publications - 21
Citations - 1611
E. J. Rymaszewski is an academic researcher from Rensselaer Polytechnic Institute. The author has contributed to research in topics: Thin film & Dielectric. The author has an hindex of 11, co-authored 21 publications receiving 1600 citations.
Papers
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Reactive sputtering deposition of low temperature tantalum suboxide thin films
TL;DR: In this paper, a relatively simple direct current sputtering deposition scheme has been employed to deposit 1000 A tantalum oxide thin films at low temperature, without further annealing, and these properties are achieved over a wide range of O2/Ar ratios when the total flow rate is kept constant.
Book
Thin-film capacitors for packaged electronics
Pushkar Jain,E. J. Rymaszewski +1 more
TL;DR: In this article, the authors present a characterization of thin-film capacitors and show that they can be used in 3D ICs for large-area power distribution, including 2D and 3D packaging.
Journal ArticleDOI
X-ray photoelectron spectroscopy study of Al/Ta2O5 and Ta2O5/Al buried interfaces
TL;DR: In this article, the peak decomposition technique was employed to identify the composition and chemical states at the interface region of thin Al/Ta2O5 and Ta2O3/Al films using the x-ray photoelectron spectroscopy technique.
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Study of tantalum oxide thin film capacitors on metallized polymer sheets for advanced packaging applications
TL;DR: In this paper, a Tantalum oxide thin film capacitors were fabricated on metallized polyimide sheet substrates and tested and it was found that the substrate's surface topography has a strong influence on the electrical properties and yields of the capacitors.