H
Herman Soemers
Researcher at University of Twente
Publications - 23
Citations - 297
Herman Soemers is an academic researcher from University of Twente. The author has contributed to research in topics: Microelectromechanical systems & Vibration isolation. The author has an hindex of 9, co-authored 23 publications receiving 272 citations. Previous affiliations of Herman Soemers include Philips.
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Design and modeling of a six DOFs MEMS-based precision manipulator
TL;DR: In this paper, a parallel kinematic mechanism with slanted leaf-springs is used to convert the motion of six in-plane electrostatic comb-drives into six DOFs at the end-effector.
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Sensor fusion for active vibration isolation in precision equipment
TL;DR: In this paper, an active hard mount suspension with a feedback strategy based on sensor fusion is proposed that uses the acceleration signal at low frequencies and the force signal at high frequencies to increase the damping ratio of internal vibration modes and to provide a high support stiffness.
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Design and Fabrication of a Planar Three-DOFs MEMS-Based Manipulator
Boudewijn R de Jong,Dannis Michel Brouwer,M.J. de Boer,Henri Jansen,Herman Soemers,Gijs Krijnen +5 more
TL;DR: In this article, a planar three-degrees-of-freedom parallel kinematic manipulator was fabricated with a simple two-mask process in conventional highly doped single-crystalline silicon (SCS) wafers.
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A single-mask thermal displacement sensor in MEMS
B. Krijnen,R.P. Hogervorst,J.W. van Dijk,Johannes Bernardus Charles Engelen,Léon A. Woldering,Dannis Michel Brouwer,Leon Abelmann,Herman Soemers +7 more
TL;DR: In this paper, a MEMS displacement sensor based on conductive heat transfer of a resistively heated silicon structure towards an actuated stage parallel to the structure is presented, which can be easily incorporated into a silicon-on-insulator-based process and fabricated within the same mask as electrostatic actuators and flexure-based stages.
Long-range Elastic Guidance Mechanisms for Electrostatic Comb-drive Actuators
TL;DR: The range of motion and output force of the often used electrostatic comb-drive with folded flexure straight guidance, as shown in Figure 1, is limited by sideways instability due to poor sideways stiffness of the folded Flexure at relatively large deflections as discussed by the authors.