Polymer based MEMS and microfluidic devices have the advantages of mechanical flexibility, lower fabrication cost and faster processing over silicon based ones. Also, many polymer materials are considered biocompatible and can be used in biological applications. A valuable class of polymers for microfabricated devices is piezoelectric functional polymers. In addition to the normal advantages of polymers, piezoelectric polymers can be directly used as an active material in different transduction applications. This paper gives an overview of piezoelectric polymers based on their operating principle. This includes three main categories: bulk piezoelectric polymers, piezocomposites and voided charged polymers. State-of-the-art piezopolymers of each category are presented with a focus on fabrication techniques and material properties. A comparison between the different piezoelectric polymers and common inorganic piezoelectric materials (PZT, ZnO, AlN and PMN?PT) is also provided in terms of piezoelectric properties. The use of piezopolymers in different electromechanical devices is also presented. This includes tactile sensors, energy harvesters, acoustic transducers and inertial sensors.

https://iopscience.iop.org/article/10.1088/0964-1726/23/3/033001/pdf

A review of piezoelectric polymers as functional materials for electromechanical transducers

More than a decade of research in the field of thermal, motion, vibration and electromagnetic radiation energy harvesting has yielded increasing power output and smaller embodiments. Power management circuits for rectification and DC-DC conversion are becoming able to efficiently convert the power from these energy harvesters. This paper summarizes recent energy harvesting results and their power management circuits.

Micropower energy harvesting

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Rfid Handbook Fundamentals And Applications In Contactless Smart Cards And Identification

Understanding of the triboelectric charge accumulation from the view of materials plays a critical role in enhancing the output performance of triboelectric nanogenerator (TENG). In this paper, we have designed a feasible approach to modify the tribo-material of TENG by filling it with high permittivity nanoparticles and forming pores. The influence of dielectricity and porosity on the output performance is discussed experimentally and theoretically, which indicates that both the surface charge density and the charge transfer quantity have a close relationship with the relative permittivity and porosity of the tribo-material. A high output performance TENG based on a composite sponge PDMS film (CS-TENG) is fabricated by optimizing both the dielectric properties and the porosity of the tribo-material. With the combination of the enhancement of permittivity and production of pores in the PDMS film, the charge density of ∼19 nC cm(-2), open-circuit voltage of 338 V, and power density of 6.47 W m(-2) are obtained at working frequency of 2.5 Hz with the optimized film consisting of 10% SrTiO3 nanoparticles (∼100 nm in size) and 15% pores in volume, which gives over 5-fold power enhancement compared with the nanogenerator based on the pure PDMS film. This work gives a better understanding of the triboelectricity produced by the TENG from the view of materials and provides a new and effective way to enhance the performance of TENG from the material itself, not just its surface modification.

Enhancing Performance of Triboelectric Nanogenerator by Filling High Dielectric Nanoparticles into Sponge PDMS Film

This paper presents a low power boost converter for thermoelectric energy harvesting that demonstrates an efficiency that is 15% higher than the state-of-the-art for voltage conversion ratios above 20. This is achieved by utilizing a technique allowing synchronous rectification in the discontinuous conduction mode. A low-power method for input voltage monitoring is presented. The low input voltage requirements allow operation from a thermoelectric generator powered by body heat. The converter, fabricated in a 0.13 μm CMOS process, operates from input voltages ranging from 20 mV to 250 mV while supplying a regulated 1 V output. The converter consumes 1.6 (1.1) μW of quiescent power, delivers up to 25 (175) μW of output power, and is 46 (75)% efficient for a 20 mV and 100 mV input, respectively.

A 20 mV Input Boost Converter With Efficient Digital Control for Thermoelectric Energy Harvesting

This brief presents a fast Fourier transform (FFT) processor that provides high throughput rate (T.R.) by applying the eight-data-path pipelined approach for wireless personal area network applications. The hardware costs, including the power consumption and area, increase due to multiple data paths and increased wordlength along stages. To resolve these issues, a novel simplification method to reduce the hardware cost in multiplication units of the multiple-path FFT approach is proposed. A multidata scaling scheme to reduce wordlengths while preserving the signal-to-quantization-noise ratio is also presented. Using UMC 90-nm 1P9M technology, a 2048-point FFT processor test chip has been designed, and its 128-point FFT kernel has been fabricated for ultrawideband (UWB) applications and also for verification. The 2048-point FFT processor can provide a T.R. of 2.4 GS/s at 300 MHz with a power consumption of 159 mW. Compared with the four-data-path approach, a power consumption saving of about 30% can be achieved under the same T.R. In addition, the 128-point FFT kernel test chip has a measured power consumption of 6.8 mW with a T.R. of 409.6 MS/s at 52 MHz to meet the UWB standard with a saving in power consumption of about 40%.

A 2.4-GS/s FFT Processor for OFDM-Based WPAN Applications

We present a batteryless, crystal-free, time division multiple access (TDMA) synchronized multinode wireless body sensor node (WBSN) system-on-chip (SoC), referred to as a Bionode, for continuous and real-time telemetry of electromyograms (EMGs), enabling intuitive upper limb prosthesis control by an amputee. The SoC utilizes state of the art in supercapacitive RF energy harvesting, biosensing analog-front-end, switching-optimized SAR ADC, ultra-low-power RF transceiver, and clock circuits. The sensor node SoCs are time synchronized with a base station, mounted on the prosthetic arm, by using the ultra-low-power TDMA controller and receiver, and the digital core circuits. A 915 MHz broadcast RF signal is utilized to synthesize the carrier frequency of the transmitter. This along with the process and voltage compensated on-chip clock obviates the need for a bulky crystal oscillator, thus providing a low-cost and highly integrated solution to the WBSNs. The SoC is verified by capturing the EMG data from a healthy human body and consumes only $24\;{\upmu}\text{W}$ , while operating exclusively from the harvested RF energy. Implemented in a $0.18\;{\upmu}\text{m}$ CMOS process, the SoC occupies $2.025\;{\text {mm}}^{2}$ silicon area. The sensor node has an extremely low weight and physical dimensions, thanks to the flexible carbon nanotube (CNT) supercapacitor, electrically small antenna (ESA), and crystal-free operation of the SoC.

A $24\,\mu \text{W}$ , Batteryless, Crystal-free, Multinode Synchronized SoC “Bionode” for Wireless Prosthesis Control

We have successfully demonstrated the fabrication of piezoelectric polydimethylsiloxane (PDMS) films utilizing multilayer casting, stacking, surface coating and micro plasma discharge processes. To realize the desired electromechanical sensitivity, cellular PDMS structures with micrometer-sized voids are implanted with bipolar charges on the opposite inner surfaces. The implanted charge pairs function as dipoles, which respond promptly to diverse electromechanical stimulation. In the prototype demonstration, cellular PDMS films with various void geometries are fabricated and internally coated with a thin layer of polytetrafluoroethylene, which can help secure the implanted charges. An electric field up to 35 MV m?1?is applied across the fabricated PDMS films to ionize the air in the voids and to accelerate the resulting bipolar charges to bombard the opposite inner surfaces. The resulting charge-implanted, cellular PDMS films show a low effective elastic modulus (E) of about 500 kPa, and a piezoelectric coefficient (d33) higher than 300 pC N?1, which is more than ten times higher than those of common piezoelectric polymers (e.g. polyvinylidene fluoride). Furthermore, the piezoelectricity of the PDMS films can be tailored by adjusting the dimensions of the cellular structures. As such, the demonstrated piezoelectric PDMS films could potentially serve as flexible and sensitive electromechanical materials, and fulfill the needs of a variety of sensor and energy harvesting applications.

https://iopscience.iop.org/article/10.1088/0960-1317/22/1/015013/pdf

Piezoelectric polydimethylsiloxane films for MEMS transducers

We present a sub-mm3, fully wireless, implantable intraocular pressure monitor microsystem (IMM) that comprises a powering coil, an antenna, a piezoresistive micro-electro-mechanical system pressure sensor, and a pressure sensing IC. The system provides a 24-h intraocular pressure monitoring, which is not possible with currently used tonometric measurements. The IMM volume is limited to 0.38 mm3 (4 × smaller than previous state-of-the-art) for the studies on laboratory rodents prior to human use. A cavity resonator magnetic coupling delivers the wireless power to the chip with 4.89% efficiency. The chip senses a change in a differential sensor resistance by providing a low-power differential resistance to frequency conversion with the measured standard deviation in differential resistance sensing of $\text{133}\ {\rm{m}}\Omega $ . The data packets are wirelessly transmitted by an ultralow power 2.4-GHz ISM band OOK transmitter. The IMM is integrated on a 5- μ m-thick biocompatible Parylene C substrate. Implemented in a 0.18-μm CMOS process, the system achieves 0.67-mmHg pressure sensitivity with differential resistance sensing and dissipates only 6.3 nW with 30 min of measurement intervals. We verify the IMM functionality in the in vivo biological experiment.

A Subcubic Millimeter Wireless Implantable Intraocular Pressure Monitor Microsystem

Glaucoma is an eye disease, where the elevated level of intraocular pressure (IOP) in the anterior chamber of the eye can damage the optic nerve causing irreversible blindness [1]. An IOP monitoring microsystem (IMM) implanted in the interior chamber of the eye is required to take frequent IOP measurements to account for its diurnal variation and dependency on the body posture, which is not possible with the widely used tonometric measurement [2–4].

Jui-Wei Tsai

Papers

A 2.4-GS/s FFT Processor for OFDM-Based WPAN Applications

A $24\,\mu \text{W}$ , Batteryless, Crystal-free, Multinode Synchronized SoC “Bionode” for Wireless Prosthesis Control

Piezoelectric polydimethylsiloxane films for MEMS transducers

A Subcubic Millimeter Wireless Implantable Intraocular Pressure Monitor Microsystem

21.3 A sub-mm 3 wireless implantable intraocular pressure monitor microsystem