K
K. P. Lee
Researcher at University of Florida
Publications - 46
Citations - 814
K. P. Lee is an academic researcher from University of Florida. The author has contributed to research in topics: Dry etching & Etching (microfabrication). The author has an hindex of 16, co-authored 46 publications receiving 792 citations.
Papers
More filters
Journal ArticleDOI
Comparison of GaN p-i-n and Schottky rectifier performance
A.P. Zhan,G. T. Dang,Fan Ren,Hyun Cho,K. P. Lee,Stephen J. Pearton,J.-I. Chyi,T.-Y. Nee,C.-C. Chuo +8 more
TL;DR: In this article, the performance of GaN p-i-n and Schottky rectifiers fabricated on the same wafer was investigated as a function of device size and operating temperature.
Journal ArticleDOI
GaN electronics for high power, high temperature applications
Stephen J. Pearton,Fan Ren,A. P. Zhang,G. T. Dang,Xian-An Cao,K. P. Lee,Hyun Cho,Brent P. Gila,Jerry W. Johnson,C. Monier,C. R. Abernathy,J. Han,Albert G. Baca,Jen-Inn Chyi,Chien-Chieh Lee,Tzer-En Nee,C.-C. Chuo,S. N. G. Chu +17 more
TL;DR: A brief review of recent progress in fabrication of high voltage GaN and AlGaN rectifiers, GaN/AlGaN heterojunction bipolar transistors and GaN metaloxide semiconductor field effect transistors is given in this article.
Journal ArticleDOI
Electrical Characterization of GaN Metal Oxide Semiconductor Diodes Using MgO as the Gate Oxide
Jihyun Kim,Brent P. Gila,R. Mehandru,Jerry W. Johnson,J. H. Shin,K. P. Lee,B. Luo,A. H. Onstine,C. R. Abernathy,Stephen J. Pearton,Fan Ren +10 more
TL;DR: In this article, the interface trap density of low-to-mid 10 11 eV -1 cm -2 was obtained from temperature conductance-voltage measurements, and a slightly lower number was obtained as compared to the conductance method.
Journal ArticleDOI
Etch characteristics of HfO2 films on Si substrates
S. Norasetthekul,P.Y. Park,K.H. Baik,K. P. Lee,J.H. Shin,Byoung-Seong Jeong,V. Shishodia,David P. Norton,Stephen J. Pearton +8 more
TL;DR: The etch rates and mechanisms for HfO2 thin films in Cl2-, SF6- or CH4/H2-based plasmas were measured as a function of source power, r.f. chuck power and discharge composition as discussed by the authors.
Journal ArticleDOI
High density plasma via hole etching in SiC
H. Cho,K. P. Lee,P. Leerungnawarat,S. N. G. Chu,Fan Ren,Stephen J. Pearton,Carl-Mikael Zetterling +6 more
TL;DR: In this paper, a SiC etch with SF6/O2 at a controlled rate of ∼ 0.6 μm min−1 and the use of Al masks achieved selectivities of >50 for SiC over Al.