K
Kevin S. Jones
Researcher at University of Florida
Publications - 440
Citations - 6558
Kevin S. Jones is an academic researcher from University of Florida. The author has contributed to research in topics: Silicon & Ion implantation. The author has an hindex of 38, co-authored 437 publications receiving 6226 citations. Previous affiliations of Kevin S. Jones include Bell Labs & University of Michigan.
Papers
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Nonmelt Laser Annealing of 1 Kev Boron Implanted Silicon
TL;DR: In this paper, heavy-doped, ultra-shallow junctions in boron implanted silicon using pulsed laser annealing have been created, where laser energy in the non-melt regime has been supplied to the silicon surface at a ramp rategreater than 1010°C/sec.
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Amorphization and Solid-Phase Epitaxial Growth of C-Cluster Ion-Implanted Si
TL;DR: Amorphization and solid-phase epitaxial growth were studied in C-cluster ion-implanted Si wafers in this paper, where C7H7 ions were implanted at a C-equivalent energy of 10-keV to C doses of 0.5-1.0
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Wet-chemical etching of FIB lift-out TEM lamellae for damage-free analysis of 3-D nanostructures.
TL;DR: A new method has been developed for cross section fabrication enabling high resolution transmission electron microscopy (TEM) analysis of 3-D nanostructures free of surrounding material and free of damage detectable by TEM analysis.
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Rapid thermal processing of WSix contacts to InP in low‐pressure N2:H2 and tertiarybutylphosphine ambients
TL;DR: In this article, WSix thin films have been used as refractory ohmic contact materials for self-aligned laser devices, with a reduction in the specific contact resistance to a value of 7.5×10−6 Ω cm2 and a decrease in the sheet resistance to values lower than 2 Ω/⧠ were observed.
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Study of end of range loop interactions with B+ implant damage using a boron doped diffusion layer
J. K. Listebarger,H. G. Robinson,Kevin S. Jones,Mark E. Law,D. D. Sieloff,J. A. Slinkman,T. O. Sedgwick +6 more
TL;DR: In this article, a boron doped epilayer was used to investigate the interaction between end of range dislocation loops (formed from Ge+ implantation) and excess point defects generated from a low dose 1014/cm2 B+ implant into silicon.