K
Kevin S. Jones
Researcher at University of Florida
Publications - 440
Citations - 6558
Kevin S. Jones is an academic researcher from University of Florida. The author has contributed to research in topics: Silicon & Ion implantation. The author has an hindex of 38, co-authored 437 publications receiving 6226 citations. Previous affiliations of Kevin S. Jones include Bell Labs & University of Michigan.
Papers
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Journal ArticleDOI
Quantification of germanium-induced suppression of interstitial injection during oxidation of silicon
Thomas P. Martin,Kevin S. Jones,Renata Camillo-Castillo,Christopher Hatem,Y. Xin,Robert Elliman +5 more
TL;DR: In this paper, the authors used a layer of implantation-induced dislocation loops to measure interstitial injection as a function of SiGe layer thickness, and showed that low-energy implantation of germanium can be used to eliminate or modulate injection of oxidation-induced interstitials.
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Energy Dependence of Transient Enhanced Diffusion and {311} Defect Kinetics
TL;DR: In this article, the authors explored the Boron TED and dissolution rates as a function of implant energy dependence and found that the diffusion enhancement depends strongly on implant energy but the dissolution rate is weakly dependent.
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Observation of the Wurtzite Phase in OMVPE Grown ZnSe/GaAs: Effect on Implantation and Rapid Thermal Annealing
TL;DR: In this paper, transmission electron diffraction patterns of cross-sectional TEM samples of OMVPE ZnSe on GaAs indicate the existence of the hexagonal wurtzite phase in the epitaxial layers.
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Effect of Surface Proximity upon Point Defects in Silicon
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Threading dislocation evolution in mega-electron-volt phosphorus implanted silicon
TL;DR: In this paper, the effect of postannealing defect formation for high energy (mega-electron-volt) phosphorus implanted silicon has been studied using etch pit studies and transmission electron microscopy (TEM).