K
Kevin S. Jones
Researcher at University of Florida
Publications - 440
Citations - 6558
Kevin S. Jones is an academic researcher from University of Florida. The author has contributed to research in topics: Silicon & Ion implantation. The author has an hindex of 38, co-authored 437 publications receiving 6226 citations. Previous affiliations of Kevin S. Jones include Bell Labs & University of Michigan.
Papers
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Proceedings ArticleDOI
Defect formation in MeV ion implantation of boron and phosphorus
TL;DR: In this article, the authors used TEM (plan view and cross section), selective silicon etching and other appropriate techniques for quantification of the damage caused by very high energy ion implantation.
Journal ArticleDOI
Structural Characterization of GaN Grown By Electron Cyclotron Resonance-Metalorganic Molecular Beam Epitaxy (ECR-MOMBE)
TL;DR: In this paper, the effect of the growth rate of the gallium nitride (GaN) layer on the surface morphology was analyzed using scanning electron microscopy (SEM).
Journal ArticleDOI
Growth and Characterization of GaAs-Based Heterostructures on Si By Mocvd
William S. Hobson,Stephen J. Pearton,Kenneth Thomas Short,Kevin S. Jones,S. M. Vernon,Dale C. Jacobson,Cammy R. Abernathy,R. Caruso +7 more
TL;DR: In this paper, different types of GaAs-AlGaAs heterostructures were grown on Si substrates by MOCVD and the defect density in as-grown samples was similar to that of the GaAs layers grown directly on Si, and the crystalline quality of the material was observed to improve slightly with postgrowth annealing at 900°C.
Journal ArticleDOI
Characteristics of 56 Mev Oxygen Implantation into Si and III-V Semiconductors
Stephen J. Pearton,Bahram Jalali,J. M. Poate,J. D. Fox,K. W. Kemper,C. W. Magee,Kevin S. Jones +6 more
TL;DR: In this paper, high energy (56 MeV) oxygen implants into Si, GaAs and InP give rise to sharp, non-Gaussian depth profiles with the distributions skewed towards greater depths.
Journal ArticleDOI
The Effects of Rapid Recrystallization and Ion Implanted Carbon on The Solid Phase Epitaxial Regrowth of Si1−xGex Alloy Layers On Silicon
TL;DR: In this paper, the effects of regrowth temperature and carbon introduction by ion implantation on the solid phase epitaxial regrowth (SPER) of strained 2000-Angstrom, Si{sub 0.88}Ge{sub 1.12}/Si alloy films grown by molecular-beam epitaxy (MBE).