R
R. Nieh
Researcher at University of Texas at Austin
Publications - 46
Citations - 2810
R. Nieh is an academic researcher from University of Texas at Austin. The author has contributed to research in topics: Gate dielectric & Equivalent oxide thickness. The author has an hindex of 28, co-authored 46 publications receiving 2744 citations.
Papers
More filters
Journal ArticleDOI
Thermal stability and electrical characteristics of ultrathin hafnium oxide gate dielectric reoxidized with rapid thermal annealing
TL;DR: In this article, the dielectric properties of ultrathin hafnium oxide reoxidized with rapid thermal annealing (RTA) have been investigated and the leakage current was found to be less than 3×10−2 ǫA/cm2 at −1.5 V (i.e., ∼2 V below VFB).
Journal ArticleDOI
Electrical characteristics of highly reliable ultrathin hafnium oxide gate dielectric
Laegu Kang,Byoung Hun Lee,Wen-Jie Qi,Yongjoo Jeon,R. Nieh,Sundararaman Gopalan,Katsunori Onishi,J.C. Lee +7 more
TL;DR: In this paper, the leakage current of the 45/spl Aring/HfO/sub 2/ sample was about 1/spl times/10/sup -4/ A/cm/sup 2/ at +1.0 V with a breakdown field /spl sim/8.5 MV/cm.
Proceedings ArticleDOI
Ultrathin hafnium oxide with low leakage and excellent reliability for alternative gate dielectric application
TL;DR: Physical, electrical and reliability characteristics of ultra thin HfO/sub 2/ as an alternative gate dielectric were studied for the first time in this article, where the process parameters of oxygen modulated dc magnetron sputtering were optimized to achieve an equivalent oxide thickness (EOT) of 11.5 /spl Aring/ without deducting the quantum mechanical effect.
Journal ArticleDOI
Electrical and reliability characteristics of ZrO2 deposited directly on Si for gate dielectric application
TL;DR: ZrO2 thin film has been studied as an alternative gate dielectric in this paper, which was deposited directly on a Si substrate by reactive sputtering, and an equivalent oxide thickness of less than 11 A with a leakage current of 1.9×10−3
Journal ArticleDOI
Bonding states and electrical properties of ultrathin HfOxNy gate dielectrics
Chang Seok Kang,Hag Ju Cho,Katsunori Onishi,R. Nieh,Rino Choi,S. Gopalan,Sid Krishnan,Jeong H. Han,Jack C. Lee +8 more
TL;DR: Hafnium oxynitride (HfOxNy) gate dielectric was prepared using reactive sputtering followed by postdeposition annealing at 650°C in a N2 ambient as discussed by the authors.