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Design Of Analog Cmos Integrated Circuits

Journal of Applied physics,Vol.33 : 1962年に発表されたレオロジー関連の論文

In this paper, a basic cell for low-power and/or low-voltage operation is identified. It is evidenced how different versions of this cell, coined as "flipped voltage follower (FVF)" have been used in the past for many applications. A detailed classification of basic topologies derived from the FVF is given. In addition, a comprehensive list of recently proposed low-voltage/low-power CMOS circuits based on the FVF is given. Although the paper has a tutorial taste, some new applications of the FVF are also presented and supported by a set of simulated and experimental results. Finally, a design example showing the application of the FVF to build systems based on translinear loops is described which shows the potential of this cell for the design of high-performance low-power/low-voltage analog and mixed-signal circuits.

The flipped voltage follower: a useful cell for low-voltage low-power circuit design

High aspect ratio (HAR) silicon etch is reviewed, including commonly used terms, history, main applications, different technological methods, critical challenges, and main theories of the technologies. Chronologically, HAR silicon etch has been conducted using wet etch in solution, reactive ion etch (RIE) in low density plasma, single-step etch at cryogenic conditions in inductively coupled plasma (ICP) combined with RIE, time-multiplexed deep silicon etch in ICP-RIE configuration reactor, and single-step etch in high density plasma at room or near room temperature. Key specifications are HAR, high etch rate, good trench sidewall profile with smooth surface, low aspect ratio dependent etch, and low etch loading effects. Till now, time-multiplexed etch process is a popular industrial practice but the intrinsic scalloped profile of a time-multiplexed etch process, resulting from alternating between passivation and etch, poses a challenge. Previously, HAR silicon etch was an application associated primarily with microelectromechanical systems. In recent years, through-silicon-via (TSV) etch applications for three-dimensional integrated circuit stacking technology has spurred research and development of this enabling technology. This potential large scale application requires HAR etch with high and stable throughput, controllable profile and surface properties, and low costs.

High aspect ratio silicon etch: A review

Living organisms use composite materials for various functions, such as mechanical support, protection, motility and the sensing of signals. Although the individual components of these materials may have poor mechanical qualities, they form composites of polymers and minerals with a remarkable variety of functional properties. Researchers are now using these natural systems as models for artificial mechanosensors and actuators, through studying both natural structures and their interactions with the environment. In addition to inspiring the design of new materials, analysis of natural structures on this basis can provide insight into evolutionary constraints on structure-function relationships in living organisms and the variety of structural solutions that emerged from these constraints.

Biomaterial systems for mechanosensing and actuation

It is shown that a generalized interpretation of the translinear (TL) principle leads quite naturally to an extension to MOS circuits. It is shown that two distinct classes of TL circuits exist, one suitable for bipolar and the other for MOS implementation. The MOS-translinear (MTL) circuit principle is derived and an initial classification of simple MTL circuits is proposed. Some examples are given of MTL circuits synthesizing nonlinear functions. >

Generalized translinear circuit principle

Arrays of MEMS fabricated flow sensors inspired by the acoustic flow-sensitive hairs found on the cerci of crickets, have been designed, fabricated and characterized. The hairs consist of up to 1 mm long SU-8 structures mounted on suspended membranes with normal translational and rotational degrees of freedom. Electrodes on the membrane and on the substrate form variable capacitors allowing for capacitive read-out. Capacitance versus voltage, frequency dependency and directional sensitivity measurements have been successfully carried out on fabricated sensor arrays, showing the viability of the concept. The sensors form a model-system allowing for investigations on sensory acoustics by their arrayed nature, their adaptivity via electrostatic interaction (frequency tuning and parametric amplifica- tion) and their susceptibility to noise (stochastic resonance)

/pdf/mems-based-hair-flow-sensors-as-model-systems-for-acoustic-aeez4s9vso.pdf

MEMS based hair flow-sensors as model systems for acoustic perception studies

This paper presents the modelling, design, fabrication and characterization of flow sensors based on the wind-receptor hairs of crickets. Cricket sensory hairs are highly sensitive to drag-forces exerted on the hair shaft. Artificial sensory hairs have been realized in SU-8 on suspended SixNy membranes. The movement of the membranes is detected capacitively. Capacitance versus voltage, frequency dependence and directional sensitivity measurements have been successfully carried out on fabricated sensor arrays, showing the viability of the concept.

https://iopscience.iop.org/article/10.1088/0960-1317/15/7/019/pdf

Artificial sensory hairs based on the flow sensitive receptor hairs of crickets

https://ris.utwente.nl/ws/files/6512468/rie_lag.pdf

RIE lag in high aspect ratio trench etching of silicon

Two 3-V CMOS low-voltage operational amplifiers (op-amps) with constant transconductance (g/sub m/) rail-to-rail input stages are presented. The constant g/sub m/ ensures a constant unity-gain frequency within the whole common-mode input range. Two new methods to control the g/sub m/ of the input stage are introduced. The op-amps contain the same class-AB output stage with rail-to-rail output swing. The common-mode input voltage swing extends the positive supply rail by 600 mV and the negative supply rail by 200 mV. The output voltage can reach the supply rails within 130 mV. The output current of the op-amps was limited to +or-2 mA, voltage gain was 85 dB, and the unity-gain frequency was 165 kHz. The op-amps were integrated in a semicustom CMOS process with transistor lengths of 10 mu m. >

Remco J. Wiegerink

Papers

Generalized translinear circuit principle

MEMS based hair flow-sensors as model systems for acoustic perception studies

Artificial sensory hairs based on the flow sensitive receptor hairs of crickets

RIE lag in high aspect ratio trench etching of silicon

CMOS low-voltage operational amplifiers with constant-G/sub m/ rail-to-rail input stage