Sara Paolillo

TL;DR: By demonstrating the structural integrity and uniformity of graphene over hundreds of micrometres, as well as reproducible mobility and carrier concentrations across a half-centimetre wafer, these results boost the prospects of using epitaxial graphene in applications beyond quantum metrology.

TL;DR: In this article, the first observation of the quantum Hall effect in epitaxial graphene was reported, which filled the yawning gap in the understanding of the electronic properties of this truly remarkable material and demonstrate suitability of the silicon carbide technology for manufactiring large area high quality graphene.

TL;DR: In this article , the authors present a model for a trilayer process in a back-end of the line manufacturing vehicle, which is calibrated and verified against top-down scanning electron microscope (SEM) and cross-sectional SEM measurements.

TL;DR: In this paper , the back end of line (BEOL) via shrink options is investigated, targeting the bottom critical dimension (CD) 10.5'nm in order to land on metal pitch 21'nm lines below, while maintaining low defectivity and low global and local CD uniformity.

TL;DR: In this article , the electrical validation of a generalized space error model is reported by comparing inline e-beam "direct" space metrology measurements with an end-of-line, yield-based, space error metric.