S
Steven Smith
Researcher at NXP Semiconductors
Publications - 3
Citations - 150
Steven Smith is an academic researcher from NXP Semiconductors. The author has contributed to research in topics: Atomic layer deposition & Copper interconnect. The author has an hindex of 3, co-authored 3 publications receiving 146 citations.
Papers
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Journal ArticleDOI
Evolution of materials technology for stacked-capacitors in 65 nm embedded-DRAM
Eric Gerritsen,Nicolas Emonet,Christian Caillat,Nicolas Jourdan,Marc Piazza,David Fraboulet,Bruce Boeck,Audrey Berthelot,Steven Smith,Pascale Mazoyer +9 more
TL;DR: In this paper, an overview of the evolution of capacitor technology is presented from the early days of planar PIS capacitors to the MIM (metal/insulator/metal) capacitors used for todays 65 nm technology node.
Journal ArticleDOI
Low resistivity tungsten for contact metallization
Steven Smith,Khaled Aouadi,Josh Collins,Eric van der Vegt,M.T. Basso,Marc Juhel,Simone Pokrant +6 more
TL;DR: A pulsed nucleation tungsten process, called ''PNL low-R"s W'', has been developed that results in near-bulk resistivity even in ultra-thin Tungsten films.
Journal ArticleDOI
Physical and electrical characterization of ALCVD TM TiN and WN x C y used as a copper diffusion barrier in dual damascene backend structures(08.2)
TL;DR: In this paper, two different ALD barrier films (TiN and WNC) were evaluated to determine how they affected the electrical properties of two-metal layer, dual damascene copper structures built in SiO2.