scispace - formally typeset
S

Sun Jung Kim

Researcher at National University of Singapore

Publications -  22
Citations -  570

Sun Jung Kim is an academic researcher from National University of Singapore. The author has contributed to research in topics: Capacitance & Capacitor. The author has an hindex of 13, co-authored 22 publications receiving 554 citations.

Papers
More filters
Journal ArticleDOI

Improvement of voltage linearity in high-/spl kappa/ MIM capacitors using HfO/sub 2/-SiO/sub 2/ stacked dielectric

TL;DR: In this article, the voltage coefficients of capacitance (VCC) in high/spl kappa/ metal-insulator-metal (MIM) capacitors can be actively engineered and voltage linearity can be significantly improved maintaining high capacitance density.
Journal ArticleDOI

RF, DC, and reliability characteristics of ALD HfO/sub 2/-Al/sub 2/O/sub 3/ laminate MIM capacitors for Si RF IC applications

TL;DR: In this article, high-performance metal-insulator-metal capacitors using atomic layer-deposited HfO/sub 2/-Al/Sub 2/O/Sub 3/ laminate are fabricated and characterized for RF and mixed-signal applications.
Journal ArticleDOI

PVD HfO 2 for high-precision MIM capacitor applications

TL;DR: In this article, metal-insulator-metal (MIM) capacitors are fabricated using sputtered HfO/sub 2/ with Ta and TaN for top and bottom electrodes, respectively.
Journal ArticleDOI

High-performance MIM capacitor using ALD high-k HfO 2 -Al 2 O 3 laminate dielectrics

TL;DR: In this article, the authors successfully fabricated and demonstrated high performance metal-insulator-metal (MIM) capacitors with HfO/sub 2/-Al/sub sub 2/Al sub 2 O/sub 3/O sub 3/ laminate dielectric using atomic layer deposition (ALD) technique.
Journal ArticleDOI

Formation of Ge nanocrystals in HfAlO high-k dielectric and application in memory device

TL;DR: In this paper, the formation of Ge nanocrystals embedded in HfAlO high-k dielectric by co-sputtering of HfO2, Al2O3, and Ge, followed by rapid thermal annealing was demonstrated.