S
Sven Ulrich
Researcher at Karlsruhe Institute of Technology
Publications - 134
Citations - 2589
Sven Ulrich is an academic researcher from Karlsruhe Institute of Technology. The author has contributed to research in topics: Thin film & Sputter deposition. The author has an hindex of 26, co-authored 124 publications receiving 2191 citations. Previous affiliations of Sven Ulrich include RWTH Aachen University.
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Journal ArticleDOI
Monitoring the thin film formation during sputter deposition of vanadium carbide
Marthe Kaufholz,Bärbel Krause,S. Kotapati,Martin Köhl,Miguel F. Mantilla,Michael Stüber,Sven Ulrich,Reinhard Schneider,Dagmar Gerthsen,Tilo Baumbach +9 more
TL;DR: The theoretical description and the experimental realisation of in situ X-ray reflectivity measurements during thin film deposition of polycrystalline vanadium carbide coatings are presented.
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Textured growth of polycrystalline MAX phase carbide coatings via thermal annealing of M/C/Al multilayers
Chongchong Tang,Martin Steinbrück,Michael Klimenkov,U. Jäntsch,Hans Jürgen Seifert,Sven Ulrich,Michael Stüber +6 more
TL;DR: In this article, annealing of magnetron-sputtered nanoscale multilayers built by individual transition metal, carbon, and aluminum layers was used to synthesize textured MAX phase films.
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The constitution and properties of cubic boron nitride thin films: a comparative study on the influence of bombarding ion energy
TL;DR: In this article, boron nitride thin films containing more than 85% of the sp 3 -bonded cubic phase (c-BN), as confirmed by infrared spectroscopy, were produced in a wide voltage range from −200 to −400 V. The results are discussed within the frame of the subplantation model.
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Characterisation of silicon carbide and silicon nitride thin films and Si3N4/SiC multilayers
TL;DR: In this article, high purity silicon carbide (SiC), silicon nitride (Si3N4−δ) monolayers as well as Si 3N4/SiC multilayers have been deposited on silicon substrates and cemented carbide inserts by r.f. magnetron sputtering technique.
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Influence of the energy of sputtered carbon atoms on the constitution of diamond-like carbon thin films
TL;DR: In this article, the influence of the energy of neutral carbon atoms on the constitution of diamond-like carbon thin films was examined by means of EELS for two different working pressures (0.2 Pa and 2 Pa) at a constant flux ratio Φ Ar+ /Φ C = 5.