Showing papers in "Nanotechnology in 1997"
TL;DR: In this paper, the authors describe subwavelength surfaces etched into silicon wafers that exhibit antireflection characteristics for visible light, which are fabricated by holographically recording a crossed-grating in a photoresist mask followed by reactive-ion etching to transfer the primary mask onto the silicon substrate.
Abstract: We describe subwavelength surfaces etched into silicon wafers that exhibit antireflection characteristics for visible light. The wafers are fabricated by holographically recording a crossed-grating in a photoresist mask followed by reactive-ion etching to transfer the primary mask onto the silicon substrate. The dependence of reflectivity on the wavelength and angle of incidence is measured. The overall antireflection performance of the corrugated silicon wafers is compared with that of standard thin-film stacks, and is interpreted with the effective medium theory and with simulation results obtained from rigorous computations.
261 citations
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TL;DR: In this article, a model and numerical simulations are presented for the response of an atomic force microscope cantilever to the extremely nonlinear impacts received while tapping a sample. But the dependence of the cantilevers amplitude and phase upon the sample stiffness, adhesion and damping are investigated using these simulations, and it is found that topographic" tapping images are not independent of sample properties, nor will it be trivial to measure materials' properties from the tapping data.
Abstract: There is a demand for good theoretical understanding of the response of an atomic force microscope cantilever to the extremely nonlinear impacts received while tapping a sample. A model and numerical simulations are presented in this paper which provide a very pleasing comparison with experimental results. The dependence of the cantilever amplitude and phase upon the sample stiffness, adhesion and damping are investigated using these simulations, and it is found that `topographic' tapping images are not independent of sample properties, nor will it be trivial to measure materials' properties from the tapping data. The simulation can be applied to other probe microscope configurations as well.
258 citations
TL;DR: In this paper, a modified, parallelized version of the Brenner's potential was used to model interatomic forces within each molecule and a Leonard-Jones 6-12 potential is used for forces between molecules.
Abstract: We used molecular dynamics to investigate the properties and design space of molecular gears fashioned from carbon nanotubes with teeth added via a benzyne reaction known to occur with C60. A modified, parallelized version of Brenner's potential was used to model interatomic forces within each molecule. A Leonard-Jones 6-12 potential was used for forces between molecules. One gear was powered by forcing the atoms near the end of the buckytube to rotate, and a second gear was allowed.to rotate by keeping the atoms near the end of its buckytube on a cylinder. The meshing aromatic gear teeth transfer angular momentum from the powered gear to the driven gear. A number of gear and gear/shaft configurations were simulated. Cases in vacuum and with an inert atmosphere were examined. In an extension to molecular dynamics technology, some simulations used a thermostat on the atmosphere while the hydrocarbon gear's temperature was allowed to fluctuate. This models cooling the gears with an atmosphere. Results suggest that these gears can operate at up to 50-100 gigahertz in a vacuum or inert atmosphere at room temperature. The failure mode involves tooth slip, not bond breaking, so failed gears can be returned to operation by lowering temperature and/or rotation rate. Videos and atomic trajectory files in xyz format are presented.
163 citations
TL;DR: In this paper, a scanning force microscopy (SFM) was used to perform nanoscale studies of domain structures and switching behavior of (PZT) thin films and the ability of effective control of domains as small as 50 nm by means of SFM was demonstrated.
Abstract: Scanning force microscopy (SFM) has been used to perform nanoscale studies of domain structures and switching behaviour of (PZT) thin films. An SFM piezoresponse mode, based on the detection of the piezoelectric vibration of a ferroelectric sample, was shown to be suitable for high resolution imaging of ferroelectric domains in thin films. The lower limit of the piezoresponse mode imaging resolution depends on the radius of the probing tip and is estimated to be of the order of several nanometers. The effect of the film microstructure on the imaging resolution is discussed. The ability of effective control of domains as small as 50 nm by means of SFM has been demonstrated. It is shown that SFM can be used in the investigation of electrical degradation effects in ferroelectric thin films. Formation of regions with unswitchable polarization as a result of fatigue, within grains of submicron size, was experimentally observed.
124 citations
TL;DR: In this article, a phenomenological model for the rotational dynamics of a single laser-powered molecular motor is discussed and tested through molecular dynamics simulations, where the motor is used to power carbon nanotube-based gears.
Abstract: A phenomenological model for the rotational dynamics of a single laser-powered molecular motor is discussed and tested through molecular dynamics simulations. The motor is used to power carbon nanotube-based gears. For a given laser power density and arrangement of free charges in the body of the gear we have defined an intrinsic frequency of the gear oscillatory rotations. The nanotube rotations are not of an oscillatory nature if the laser field frequency is of the same order of magnitude as the intrinsic frequency of the tube and there is an additional phase match between the two. For the laser-powered gear motor dynamics, the rotational angular momentum of the driven gear tend to stabilize the rotational dynamics of the system, and unidirectional rotations for the entire duration of the simulations are observed.
100 citations
TL;DR: In this paper, a broad range of materials such as non-ferrous metals or plastics can be machined, producing real three-dimensional structures with an optical surface quality, and the high requirements in terms of machine characteristics are currently met by only few ultraprecision machine tools.
Abstract: The fabrication of microcomponents or microstructured surfaces with conventional manufacturing methods - such as turning, milling or drilling - imposes high demands on the machine behavior. The high requirements in terms of machine characteristics are currently met by only few ultraprecision machine tools. A broad range of materials such as, for example, non-ferrous metals or plastics can be machined, producing real three-dimensional structures with an optical surface quality
89 citations
TL;DR: In this paper, the transfer of vibrations from a sample to an AFM-cantilever is described theoretically supposing a rectangular-beam cantilever with the sensor tip at its very end and taking into account flexural vibrations only.
Abstract: The cantilever in an atomic force microscope (AFM) is forced to vibrations if its sensor tip is in contact with an insonified sample. These vibrations and the motion of the sensor tip depend on the forces between the sensor tip and the sample, the mechanical excitation of the sample surface, and the oscillatory behaviour of the cantilever. In this paper, the transfer of vibrations from a sample to an AFM-cantilever is described theoretically supposing a rectangular-beam cantilever with the sensor tip at its very end and taking into account flexural vibrations only. The calculations include nonlinear effects resulting from the nonlinearity of the tip - sample forces. The comparison with experimental results shows a convincing agreement. The presented theory yields the fundamentals to determine elastic properties and adhesive forces of a sample surface with the lateral resolution of an AFM exploiting AFM-cantilever vibrations enforced by a suitable insonification of the sample.
71 citations
TL;DR: In this article, the possibility of SPM-based data storage regarding both its recording density and readout speed for ultra-high density data storage is described regarding their gap control to achieve high-speed readout.
Abstract: The possibility of SPM-based data storage is described regarding both its recording density and readout speed for ultrahigh density data storage. We consider their gap control to achieve high-speed readout. Suitable SPM-based storages are selected and their details are studied. As a result, scanning near-field optical microscope (SNOM)- and atomic force microscope (AFM)-based storages are expected to be candidates for future storage. SNOM-based storage is for . AFM-based storage is for . Using new force modulation AFM pit recording, an ultrahigh recording density of and a readout speed of are demonstrated.
56 citations
TL;DR: In this paper, a buckyball, cage or idealized atom in a helium fluid flowing axially inside a carbon nanotube was simulated and shown to reach fluid velocity within 5 ps.
Abstract: Future nanotechnology applications are likely to involve reactive or non-reactive species carried along a fluid stream. We have performed several molecular dynamics simulations of a buckyball, , cage or idealized atom in a helium fluid flowing axially inside a carbon nanotube. The fluid was started at some initial velocity and both the fluid and buckyball allowed to recycle axially via minimum image boundary conditions. A buckyball introduced into the feedstream (started at zero velocity) usually reached fluid velocity within 5 ps. Leakage rates of helium past the depended on the nanotube diameter and fluid velocity. These leakage rates and other important features of the dynamics changed significantly when was modelled as an idealized atom or when the nanotube was held rigid, suggesting that simulations of fluid dynamics inside nanomachines should be fully dynamic and atomistic.
50 citations
TL;DR: In this article, an organosilane monolayer consisting of trimethylsilyl ([ - ) groups prepared on the native oxide of a silicon substrate effectively served as a resist material for AFM-based nanolithography.
Abstract: An organosilane monolayer consisting of trimethylsilyl ([ - ) groups prepared on the native oxide of a silicon substrate effectively served as a resist material for AFM-based nanolithography. The patterning of this resist was performed through its electrochemical degradation locally induced around the contact point of a conductive AFM probe while biasing the sample substrate positively. In the region where the probe passed, the monolayer resist was degraded and the underlying silicon oxide surface was selectively uncovered. The number of electrons injected into the probe-scanned region was controlled by conducting the AFM lithography in constant current mode. By means of this constant current AFM lithography a sufficient amount of electrons could be injected even at high probe-scan rates faster than . It was demonstrated that the TMS monolayer resist was sensitive enough to allow line drawing at a probe scan rate of .
42 citations
TL;DR: In this article, a new scanning method, ''touch and lift'' aimed to improve the simultaneous acquisition of topography and force -distance curves on each point of the scanned surface, is presented.
Abstract: A new scanning method, `touch and lift', aimed to improve the simultaneous acquisition of topography and force - distance curves on each point of the scanned surface, is presented. This method does not damage the sample or the cantilever and enables us to collect a lot of data in a relatively short time. Its most important feature is that data are directly organized in `force-slices', i.e. images giving immediate qualitative information on the physico-chemical structure of the sample. We present and discuss such images for two samples: a fluorescein isothyocyanate grating on silicon in air and a peroxidase grating on silicon in water, measuring the spatial variation of stiffness, attractive forces and adhesion in both cases.
TL;DR: In this paper, a semiquantitative approach of the elasticity measurement taking into account the nonlinearity of the tip is proposed and described, where the elastic modulus of one of the constituents of a material relative to another constituent is known and used as a reference.
Abstract: Force modulation microscopy via sample displacement has been used to image the elastic characteristics of a stiff material - a nickel-based superalloy in which the two phases have close Young's moduli. The experimental operating conditions for obtaining good images are such that the hypothesis of a linear tip - sample interaction is difficult to satisfy when stiff samples are involved, more difficult for a given static load than with compliant materials. To limit the undesirable effects of friction, the cantilever deflection amplitude must be kept small and the modulation frequency must be chosen outside a resonance of the system, but high enough to generate a strong dynamic load able to sufficiently indent the sample. A semiquantitative approach of the elasticity measurement taking into account the nonlinearity of the tip - sample interaction is proposed and described. The semiquantitative term is understood here as the possibility of measuring the elastic modulus of one of the constituents of a material relative to another constituent, the Young's modulus of which is known and used as a reference.
TL;DR: In this paper, the authors used the tools of rigid-body dynamics to address the zero-point energy problem of graphite bearing simulations and found that a frictionless bearing will undergo superrotation, a classical dynamical behavior reminiscent of superfluidity.
Abstract: Various types of molecular bearings, gears, joints, etc have recently been proposed and studied in the growing nanotechnology literature using classical molecular dynamics. In a previous study, we reported simulations for several model graphite bearings using fully atomistic molecular dynamics simulations. It was subsequently found that various predictions based on simulations of this type do not agree with those of a more correct quantum approach owing to leakage of the quantum zero-point vibrational energy in the molecular dynamics simulations. In this study we use the tools of rigid-body dynamics to address the zero-point energy problem. The results of these simulations are striking in the sense that under certain conditions the bearing is found to be frictionless, as previously alluded to by Feynman. A frictionless bearing will undergo `superrotation', a classical dynamical behavior reminiscent of superfluidity. States which are chaotic in nature may not have this new characteristic, an issue we investigate with maps of phase space.
TL;DR: In this article, the stiffness and thermally induced positional uncertainty of three designs -a robotic arm, a Stewart platform, and one member of the new family -were analyzed and compared, and it was shown that the Stewart platform provides the greatest stiffness for a given structural mass but has the most restrictive range of motion.
Abstract: Positional control is fundamental to most manufacturing processes as well as a wide range of other applications. Many types of positional devices have been proposed and used, ranging from robotic arms to Stewart platforms. This paper discusses a new family of six degrees of freedom positional control devices which generally combine simple designs, high stiffness and strength, and a wider range of motion. Stiffness is particularly advantageous in very small (submicron) positional devices as thermal motion is a significant source of positional uncertainty. The stiffness and thermally induced positional uncertainty of three designs - a robotic arm, a Stewart platform, and one member of the new family - are analyzed and compared. The Stewart platform provides the greatest stiffness for a given structural mass but has the most restrictive range of motion. The robotic arm is least stiff. The new proposal combines greater stiffness than the robotic arm with a significantly greater range of motion than the Stewart platform.
TL;DR: In this paper, the gelation system of a 1:1 mixture of cholesterol-containing isocyanuric acid (1) and cholesterolcontaining 2,4,6-triaminopyrimidine (2) in organic fluids was investigated to understand the mechanism.
Abstract: The gelation system of a 1:1 mixture of cholesterol-containing isocyanuric acid (1) and cholesterol-containing 2,4,6-triaminopyrimidine (2) in organic fluids was investigated to understand the gelation mechanism. A series of gelation tests have shown that the gelation is remarkably dependent upon the cooling rate of the mixture solution as well as the nature of solvents and concentrations. The investigation using FT-IR revealed that the mismatched hydrogen-bonding interaction between (1) and (2) is responsible for the gelation and well defined hydrogen-bonding interaction such as a `molecular tape' rather results in coprecipitation. It was confirmed by the gelation test of two-faced (1) and (2) with the complementary single-faced compounds that the gel is constructed by the three-dimensional network through an irregular hydrogen-bonding interaction.
TL;DR: In this paper, the energy levels of 3D quantum confinement structures with finite potential barriers were investigated. But the authors focused on 3D systems and did not consider the effects of nonparabolicity.
Abstract: Energy levels are calculated for three-dimensional (3D) quantum-confinement structures with finite potential barriers. , and systems are considered. Analytic results are presented for spherical structures including the effects of nonparabolicity. A numerical method is also presented for the calculation of the energy levels in a 3D quantum-confinement structure in the shape of a cube or a parallelopiped. The method is applied for calculating the energy shift in a cylindrical dot of the system.
TL;DR: In this paper, the authors investigated the possibility of storing data using H and F on a polymer to signify 0 and 1 bits, and they showed that the difference between the B-F and B-H interaction energies for either C5H5B or C3H3N2B is only slightly larger than the variation in B -F interaction energy with type of neighboring atoms.
Abstract: We investigate the possibility of storing data using H and F on a polymer to signify 0 and 1 bits. We show that the difference between the B-F and B-H interaction energies for either C5H5B or C3H3N2B is only slightly larger than the variation in B-F interaction energy with type of neighboring atoms. Pyridine (C5H5N) and (CH3)3P=O have a much larger difference in the H and F interaction energies. (CH3)3P=O may be better suited as a surface probe, because the interaction with neighboring data sites should be smaller.
TL;DR: In this article, the authors consider the intermediate metabolism of a hydrocarbon assembler, i.e. the set of reactions that permit processing of the feedstock molecules and their conversion into molecular tools (positionally controlled carbenes, radicals and other reactive species).
Abstract: Molecular manufacturing should let us synthesize most arrangements of atoms that are consistent with physical law. Assemblers have been proposed as a means of accomplishing this objective. They would be able to build a wide range of useful products as well as copies of themselves. A simpler though less general proposal is a hydrocarbon assembler, restricted to manufacturing relatively stiff hydrocarbons. The design and analysis of such an assembler should be substantially simpler than that of a more general assembler. In this paper, we consider the `intermediary metabolism' of a hydrocarbon assembler, i.e. the set of reactions that permit processing of the feedstock molecules and their conversion into molecular tools (positionally controlled carbenes, radicals, and other reactive species). The specific feedstock molecule analyzed is butadiyne (a linear molecule, , also known as diacetylene; not to be confused with the more common but chemically distinct nonlinear molecule butadiene: ).
TL;DR: In this article, the authors describe the application of scanning capacitance microscopy (SCM) to two different types of samples: a Si semiconductor sample with three different dopant regions and a ferroelectric thin film deposited on a metal substrate.
Abstract: In this paper we describe the application of scanning capacitance microscopy (SCM) to two different types of samples: a Si semiconductor sample with three different dopant regions and a ferroelectric thin film deposited on a metal substrate. In our study of the first sample, an anomaly in the SCM signal was observed at the p-n junction when the bias voltage was 0 V. There was a discrepancy between the dC/dV versus bias voltage curves obtained from two different types of measurements: one derived from SCM images taken at various bias voltages, and the other directly measured by sweeping the bias voltage while the probe was located at one position. In the case of the second sample, features seen in images of simultaneously acquired SCM and atomic force microscopy images imply that smaller size grains do not possess ferroelectric properties.
TL;DR: In this article, an air-cleaved, nominally (111)-oriented and a -miscut, mechanically polished (111-oriented) surface was subjected to irradiation by 4.5 keV ions incident at a glancing angle of to the surface.
Abstract: We have subjected both an air-cleaved, nominally (111)-oriented and a -miscut, mechanically polished (111)-oriented surface to irradiation by 4.5 keV ions incident at a glancing angle of to the surface. The evolution of the surface morphology was followed using atomic force microscopy with a lateral resolution of approximately 10 nm. The initial root mean square roughness of the mechanically polished surface was , this value being the mean of 30 separate measurements on randomly selected areas of the surface. Following a fluence of , the RMS roughness had decreased to . This value is only 75% of the Ca - F interlayer spacing of the (111)-oriented crystal. The data suggest that surface irregularities are removed by sputtering at the edges of atomic steps. The planarization mechanism on vicinal surfaces appears to require diffusion along step edges or repulsive step - step interactions to limit statistical roughening of the step edges during ion irradiation.
TL;DR: In this paper, it is argued that classical molecular dynamics studies of nanomachines may not give an accurate representation of their performance, and a new method, internal coordinate quantum Monte Carlo, an improved technique for computing quantum mechanical ground-state energies and wavefunctions, has the potential capability to model these systems.
Abstract: In this article it is argued that classical molecular dynamics studies of nanomachines may not give an accurate representation of their performance. Fortunately a new method, internal coordinate quantum Monte Carlo, an improved technique for computing quantum mechanical ground-state energies and wavefunctions, has the potential capability to model these systems. Some relevant examples demonstrate that the quantum ground state for many-body systems similar to those of interest in nanotechnology has a qualitatively different structure than that obtained from a molecular dynamics calculation which exhibited chaos and gross instabilities at energies of only a fraction of the ground-state energy. This result casts uncertainty on the reliability of using the molecular dynamics method to calculate the structure or any other dynamical quantity relevant to nanotechnology.
TL;DR: In this article, the authors investigated CR-39 samples irradiated by and ions with energy 126 MeV and 209 MeV, respectively, and observed almost all of the possible processes on the surface.
Abstract: In our study we investigated CR-39 samples irradiated by and ions with energy 126 MeV and 209 MeV, respectively. We observed almost all of the possible processes on the surface. We found track cores (10 - 20 nm) surrounded by a much larger molehill-like halo with a diameter of 100 - 500 nm, corresponding to the electron collision cascade. We observed tubes roughly 1000 nm long with a diameter of 50 - 100 nm.
TL;DR: In this paper, the atomic force microscope (AFM) is used as a powerful technique for the machining and imaging of a nonconducting, thick, photoresist and linear relationships are established for the number of passes to achieve the corresponding attainable depth.
Abstract: In this paper, the atomic force microscope (AFM) is used as a powerful technique for the machining and imaging of a nonconducting, thick, photoresist. A systematic approach is adopted to determine the minimum number of passes of the AFM probe tip and the optimized maximum force that could be applied by a Si cantilever on a photoresist to achieve the desired modifications. Linear relationships are established for the number of passes to achieve the corresponding attainable depth. V-grooves are fabricated in the photoresist using high normal forces of 5 and with a transverse speed of . With a higher manoeuvring speed of , a window is created in the photoresist without significant irregular undulation at its base. A regular window of with depth 60 nm and a line window of width and depth 12 nm are successfully fabricated in silicon using the photoresist machined pattern as a mask for wet preferential Si etching.
TL;DR: In this article, a photon scanning tunneling microscope with a lateral resolution of a few nanometers is successfully constructed by using a total internal reflection arrangement in combination with an uncoated optical fiber probe.
Abstract: A photon scanning tunneling microscope with a lateral resolution of a few nanometers is successfully constructed. This is achieved by using a total internal reflection arrangement in combination with an uncoated optical fiber probe. A shear force technique for the tip-to-sample distance regulation is also employed. Chemically etched optical fiber probes have resonance frequency at , with a Q factor of more than 100. The intensity of the evanescent field picked up by a fiber tip is traced as a function of tip-to-sample separation. The intensity decay is exponential, therefore a typical example of an evanescent wave. An optical image of dispersed latex spheres is displayed. The image is in good correlation to the simultaneously obtained topographic image. In the optical image, each sphere is displayed as the dim area. Optical images obtained by Ar laser and Xe lamp are displayed. For Xe lamp the lateral resolution is comparable with the result for Ar laser.
TL;DR: In this article, a nanometer scale electrically conducting lines and quantum structures on chromium (Cr) films have been fabricated with an ambient scanning tunnelling microscope and a subsequent CR-14 chromium etch.
Abstract: In this work, nanometer scale electrically conducting lines and quantum structures on chromium (Cr) films have been fabricated with an ambient scanning tunnelling microscope and a subsequent CR-14 chromium etch. The line width of these structures is approximately 60 nm and the height of the lines is approximately 10 nm. In addition, experiments have been performed to determine the Cr etch rate in CR-14 etchant and the thickness of the Cr layer that could be oxidized through by the STM tunnelling current.
TL;DR: The polynomial step function fit (PSFF) as discussed by the authors algorithm extracts step heights from noisy and distorted scanning-probe microscope (SPM) images, which can be used for image distortion correction.
Abstract: A new algorithm, the polynomial step-function fit (PSFF), is presented. The PSFF algorithm extracts step heights from noisy and distorted scanning-probe microscope (SPM) images. A one-dimensional, line-by-line implementation as well as a two-dimensional, full-image version are presented. The PSFF algorithm allows the correction of image distortions due to nonlinearities in the piezoelectric scanner and Abbe offset errors, but piezoelectric creep and hysteresis must be corrected separately, and may set the ultimate physical limitations on the accuracy of the PSFF algorithm. The PSFF algorithm is demonstrated with a real sample.
TL;DR: In this article, a novel ultrahigh vacuum system for the fabrication and measurement of nanostructures has been developed, which consists of a preparation chamber, a precise mask deposition facility, a scanning tunneling microscope (STM) for nanofabrication, and a low temperature four-contact-probe apparatus.
Abstract: A novel ultrahigh vacuum system for the fabrication and measurement of nanostructures has been developed, which consists of a preparation chamber, a precise mask deposition facility, a scanning tunneling microscope (STM) for nanofabrication, and a low temperature four-contact-probe apparatus. Using the field-induced atom transfer from a gold STM tip, it has been demonstrated that nanometer-scale gold structures can be fabricated not only on an atomically clean - surface but also in a gap region among four macroscopic electrodes on a sputter-cleaned Si(111) surface. The overall findings clearly suggest that the STM atom-transfer technique has proved itself to be a very promising candidate for fabricating nanometer-scale single electron devices.
TL;DR: In this paper, an ultrafiltration membrane pore network was filled with electrodeposited nickel and analyzed simultaneously with normal scanning force microscopy (SFM) and electrical-conductivity SFM.
Abstract: A method for local investigation of ultrafiltration membrane pore networks has been developed in order to complement bulk measurements and calculations. An membrane (200 nm) pore network was filled with electrodeposited nickel. Membranes were analysed simultaneously with normal scanning force microscopy (SFM) and electrical-conductivity SFM. Cantilevers coated with cm diamond were used to map both normal force and conductivity. Conductivity images show two kinds of pores: bright pores with diameters of and grey pores with diameters of , depending on the depth of the nickel tubes. The average pore diameter measured from the normal SFM images is , and the ratio of the conductive pores to total number of pores is 49.8%. Preferential flow paths can be established from this technique.
TL;DR: In this article, a preliminary evaluation of the compatibility, spatial resolution, and sensitivity of scanning Maxwell-stress microscopy (SMM) as an in situ diagnostic technique for SPM oxidation of silicon is presented.
Abstract: A preliminary evaluation of the compatibility, spatial resolution, and sensitivity of scanning Maxwell-stress microscopy (SMM) as an in situ diagnostic technique for SPM oxidation of silicon is presented. These results indicate that SMM will provide us with a more detailed understanding of the reaction mechanism which occurs at the tip - sample junction during SPM oxidation. SMM also appears to be a promising technique for simultaneously investigating dimensional and electrical properties of molecular distributions within highly complex micro-environments such as phase-separated polymer systems. This effort to integrate SPM-based fabrication and diagnostics is discussed in terms of the development of predictive physical models for the optimization of the fabrication process and possible choices of future SPM-based nanodevices.
TL;DR: In this article, a Talystep and an atomic force microscope (AFM) are used to sense the surface and generate profiles that are a convolution of the stylus and the shape of the grating's surface.
Abstract: We compare two methods for characterizing the profile of surface relief diffraction gratings. First a Talystep and an atomic force microscope (AFM) are used to sense the surface and generate profiles that are a convolution of the stylus and the shape of the grating's surface. Second the reflectivity of the grating is scanned as a function of the angle of incidence. The shape of the observed anomalies, caused by radiation coupling to surface plasmons, depends critically on the groove profile and can be used to determine the true form of the surface. By comparing the optical and mechanical measurements we show that it is possible to determine the effective radius of curvature of the Talystep and AFM styli.