Journal ArticleDOI
A Dual-Stage Piezoelectric Stack for High-Speed and Long-Range Actuation
Gang Yan,Yong Liu,Zhihua Feng +2 more
TLDR
In this paper, a dual-stage piezoelectric stack is presented, which consists of three parts, which are used for high-speed actuation, vibration isolation, and long-range actuation.Abstract:
A dual-stage piezoelectric stack is presented. It consists of three parts, which are used for high-speed actuation, vibration isolation, and long-range actuation. This dual-stage piezoelectric stack is a modified piezoelectric stack and appears as a single stack. The first resonance frequency of the original piezoelectric stack is 40 kHz. The 1-dB cutoff frequency of the original piezoelectric stack is approximately 12 kHz, and the travel range is 16 μm. The 1-dB cutoff frequency of the dual-stage piezoelectric stack is approximately 85 kHz, and the travel range varies approximately from 1.2 to 12.8 μm. The main contribution of this paper is the use of a vibration isolation actuator to prevent coupling between high-speed and long-range actuators.read more
Citations
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Journal ArticleDOI
Continuous Integral Terminal Third-Order Sliding Mode Motion Control for Piezoelectric Nanopositioning System
TL;DR: Wang et al. as mentioned in this paper proposed a continuous third-order integral terminal sliding mode control (3-ITSMC) strategy dedicated to motion tracking control of a piezoelectric-driven nanopositioning system.
Journal ArticleDOI
Design and control of a multi-DOF micromanipulator dedicated to multiscale micromanipulation
TL;DR: Experimental results demonstrate that the micromanipulator presents good characteristics, and precision and robust operation can be acquired using the cooperative controller, and an improved nonsymmetrical Bouc–Wen model and a fuzzy regulator are proposed in the SMC.
Journal ArticleDOI
On the Disturbance Rejection of a Piezoelectric Driven Nanopositioning System
TL;DR: Both numerical and experimental results demonstrate that the VBADRC is not only able to provide the same disturbance estimation ability as the LADRC, but also more powerful in noise attenuation and reference tracking.
Journal ArticleDOI
Fractional Order Based Modeling and Identification of Coupled Creep and Hysteresis Effects in Piezoelectric Actuators
TL;DR: In this paper, a coupled fractional-order creep and hysteresis model is established using only five parameters, and the properties of the model are investigated under sinusoidal and step inputs.
Journal ArticleDOI
Closed-Loop Range-Based Control of Dual-Stage Nanopositioning Systems
TL;DR: A closed-loop control framework for dual-stage nanopositioning systems is presented that allows the user to allocate control efforts to the individual actuators based on their range capabilities, and tracking results show that the root-mean-square tracking error for various triangular reference trajectories is improved.
References
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Journal ArticleDOI
A Survey of Control Issues in Nanopositioning
TL;DR: This paper presents an overview of nanopositioning technologies and devices emphasizing the key role of advanced control techniques in improving precision, accuracy, and speed of operation of these systems.
Journal ArticleDOI
A high-speed atomic force microscope for studying biological macromolecules.
TL;DR: In this paper, a high-speed scanner, free of resonant vibrations up to 60 kHz, small cantilevers with high resonance frequencies (450-650 kHz) and small spring constants (150-280 pN/nm), and several electronic devices of wide bandwidth are presented.
Journal ArticleDOI
High-speed atomic force microscopy for nano-visualization of dynamic biomolecular processes
TL;DR: The atomic force microscope (AFM) has a unique capability of allowing the high-resolution imaging of biological samples on substratum surfaces in physiological solutions, which has enabled the direct visualization of dynamic structural changes and dynamic interactions occurring in individual biological macromolecules, which is not possible with other techniques as discussed by the authors.
Journal ArticleDOI
Invited review article: high-speed flexure-guided nanopositioning: mechanical design and control issues.
TL;DR: This paper surveys key advances in mechanical design and control of dynamic effects and nonlinearities, in the context of high-speed nanopositioning, as well as future challenges and research topics.
Journal ArticleDOI
A review of feedforward control approaches in nanopositioning for high-speed spm
TL;DR: In particular, inversion-based control can find the feedforward input needed to account for the positioning dynamics and, thus, achieve the required precision and bandwidth as mentioned in this paper, which can substantially impact the throughput of a wide range of emerging nanosciences and nanotechnologies.
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