Journal ArticleDOI
A review of feedforward control approaches in nanopositioning for high-speed spm
TLDR
In particular, inversion-based control can find the feedforward input needed to account for the positioning dynamics and, thus, achieve the required precision and bandwidth as mentioned in this paper, which can substantially impact the throughput of a wide range of emerging nanosciences and nanotechnologies.Abstract:
Control can enable high-bandwidth nanopositioning needed to increase the operating speed of scanning probe microscopes (SPMs). High-speed SPMs can substantially impact the throughput of a wide range of emerging nanosciences and nanotechnologies. In particular, inversion-based control can find the feedforward input needed to account for the positioning dynamics and, thus, achieve the required precision and bandwidth. This article reviews inversion-based feedforward approaches used for high-speed SPMs such as optimal inversion that accounts for model uncertainty and inversion-based iterative control for repetitive applications. The article establishes connections to other existing methods such as zero-phase-error-tracking feedforward and robust feedforward. Additionally the article reviews the use of feedforward in emerging applications such as SPM-based nanoscale combinatorial-science studies, image-based control for subnanometer-scale studies, and imaging of large soft biosamples with SPMs.read more
Citations
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Journal ArticleDOI
Modeling and Control of Piezo-Actuated Nanopositioning Stages: A Survey
TL;DR: The progresses of different modeling and control approaches for piezo-actuated nanopositioning stages are discussed and new opportunities for the extended studies are highlighted.
Journal ArticleDOI
Invited review article: high-speed flexure-guided nanopositioning: mechanical design and control issues.
TL;DR: This paper surveys key advances in mechanical design and control of dynamic effects and nonlinearities, in the context of high-speed nanopositioning, as well as future challenges and research topics.
Journal ArticleDOI
Design and Control of a Three-Axis Serial-Kinematic High-Bandwidth Nanopositioner
Brian J. Kenton,Kam K. Leang +1 more
TL;DR: In this article, a three-axis serial-kinematic nanopositioning stage is designed for high-bandwidth applications that include video-rate scanning probe microscopy and high-throughput probe-based nanofabrication.
Journal ArticleDOI
Analysis and comparison of three discrete-time feedforward model-inverse control techniques for nonminimum-phase systems☆
TL;DR: In this article, the authors examine three stable approximate model-inverse feedforward control techniques, the non-minimum-phase zeros ignore (NPZ-Ignore), the zero-phase error tracking controller (ZPETC), and the zeromagnitude-error tracking controller(ZMETC), which have frequently been used for NMP systems.
Journal ArticleDOI
Real-time inverse hysteresis compensation of piezoelectric actuators with a modified Prandtl-Ishlinskii model
TL;DR: The experimental results show that the tracking errors caused by the hysteresis effect are reduced by about 90%, which clearly demonstrates the effectiveness of the proposed inverse compensation method with the modified Prandtl-Ishlinskii model.
References
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Journal ArticleDOI
Atomic force microscope
TL;DR: The atomic force microscope as mentioned in this paper is a combination of the principles of the scanning tunneling microscope and the stylus profilometer, which was proposed as a method to measure forces as small as 10-18 N. As one application for this concept, they introduce a new type of microscope capable of investigating surfaces of insulators on an atomic scale.
Journal ArticleDOI
Force measurements with the atomic force microscope: Technique, interpretation and applications
TL;DR: The atomic force microscope (AFM) is not only used to image the topography of solid surfaces at high resolution but also to measure force-versus-distance curves as discussed by the authors, which provide valuable information on local material properties such as elasticity, hardness, Hamaker constant, adhesion and surface charge densities.
Journal ArticleDOI
Bettering Operation of Robots by Learning
TL;DR: A betterment process for the operation of a mechanical robot in a sense that it betters the nextoperation of a robot by using the previous operation's data is proposed.
Journal ArticleDOI
Paper: The internal model principle of control theory
B. A. Francis,W. M. Wonham +1 more
TL;DR: The Internal Model Principle is extended to weakly nonlinear systems subjected to step disturbances and reference signals and is shown that, in the frequency domain, the purpose of the internal model is to supply closed loop transmission zeros which cancel the unstable poles of the disturbance andreference signals.
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