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Journal ArticleDOI

A field-ion microscopy study of chemically vapour deposited molybdenum and tungsten thin films

E.D. Boyes
- 01 Feb 1972 - 
- Vol. 26, Iss: 2, pp 207-221
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TLDR
In this article, Molybdenum films on tungsten substrates were progressively field evaporated to reveal the interface, and they were found to be dependant on deposition temperature, previous substrate thermal rearrangement and vacuum conditions.
Abstract
Films of molybdenum and tungsten, 0–500 A thick have been chemically vapour deposited onto field-ion emitter substrates by the thermal decomposition of the appropriate hexacarbonyl. Epitaxial molybdenum films on tungsten substrates could be progressively field evaporated to reveal the interface. Molybdenum film structure and purity were found to be dependant on deposition temperature, previous substrate thermal rearrangement and vacuum conditions. Tungsten films on field evaporated molybdenum substrates were of high purity, epitaxial, and comparatively insensitive to deposition conditions whilst those on platinum were non-epitaxial but with a pronounced 〈211〉 texture.

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Citations
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Journal ArticleDOI

Chemical vapor deposition of metals: Part 1. An overview of CVD processes

TL;DR: In this article, a review of the chemical vapor deposition (CVD) of metals is presented, where metal-containing compounds are being synthesized as new precursors, and the results from CVD experiments can be used to assist in the development of new CVD precursor.
Journal ArticleDOI

Field-ion microscopy of interphase interfaces: II. Experimental

TL;DR: This paper demonstrates the use of the analytical techniques, developed in the companion paper, to determine interfacial parameters from a variety of multiphase structures and shows that accurate orientation relationships and the structure of unknown phases can be derived from this approach.
Journal ArticleDOI

Field emission/field-ion microscopy as a tool for thin film and surface studies

TL;DR: In this paper, a review of some of the uses of field emission and field-ion microscopy in the study of thin films and surfaces is presented, emphasizing the parameters that can be measured and the applications and limitations of the technique, rather than its mode of operation.
Journal ArticleDOI

Field ion microscopic observations of the formation of molybdenum films epitaxially related to tungsten sub substrates

TL;DR: In this paper, the field ion microscope was used to study the structure of molybdenum vapor-de-posited on tungsten tips, and all films became epitaxial when subsequently heated, with the low temperature films passing through intermediate structures similar to those possessed by the others as-formed.
Journal ArticleDOI

Non‐metallic surfaces for field‐emission and field‐ion microscopy

TL;DR: In this paper, a procedure for the chemical vapour deposition of layers of silicon, silicon nitride, and carbon within a field-emission/field-ion microscope is described, and surface topography and work function contrast of the silicon layers are discussed, and a fieldinduced chemical reaction between a tungsten surface and a silane ammonia gas mixture is reported.
References
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Journal ArticleDOI

The influence of dislocations on crystal growth

TL;DR: In fact, the existence of a critical finite supersaturation for further growth has only been established for a few materials, and then for individual faces of individual crystals, being different from case to case as discussed by the authors.
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Crystal Interfaces. Part II. Finite Overgrowths

TL;DR: In this article, the interfacial energy between a crystalline film and a substrate of a different substance for the simple case in which the lattice parameters differ in one direction only, is presented.
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Field Ion Microscopy

TL;DR: In this article, the basic physical effects used in field ion microscopy are not yet fully understood, and a modified mechanism of field ionization and image interpretation has been proposed, using a high-voltage field ion microscope operated at up to 45 kV.
Journal ArticleDOI

On field evaporation

TL;DR: The theory of field evaporation outlined in previous publications (Muller 1956, Gomer and Swanson 1963, Brandon 1965 a) has been extended to include the effects of image gas bombardment of the specimen and has been experimentally tested for the metals W, Mo and Pt in the range 60 to 90°K.
Journal ArticleDOI

The direct observation of imperfections in crystals

TL;DR: A review of the various methods available for the direct observation of lattice imperfections in crystals is given in this article, with particular emphasis on properties which allow the imperfections to be made visible.