Journal ArticleDOI
Calorimetric and acoustic study of ultraviolet laser ablation of polymers
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In this paper, the mechanism of pulsed laser ablation of a polymer at the wavelengths of 193, 248, and 308 nm was investigated and the results were mutually consistent and provide insight into the ablation mechanism.Abstract:
Calorimetric and acoustic studies of the mechanism of pulsed laser ablation of a polymer at the wavelengths of 193, 248, and 308 nm are reported. The results are mutually consistent and provide insight into the ablation mechanism.read more
Citations
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Journal ArticleDOI
Mechanisms of pulsed laser ablation of biological tissues.
Alfred Vogel,Vasan Venugopalan +1 more
TL;DR: It was found that the structure and morphology also affect the energy transport among tissue constituents and therefore the ablation efficiency of biological tissues is increased.
Journal ArticleDOI
Ablation of Polymers and Biological Tissue by Ultraviolet Lasers
TL;DR: Dry photoetching technique, when pulsed, ultraviolet laser radiation falls on the surface of an organic polymer or biological tissue, the material at the surface is spontaneously etched away to a depth of 0.1 to several micrometers.
Journal ArticleDOI
Dynamics of UV laser ablation of organic polymer surfaces
E. Sutcliffe,R. Srinivasan +1 more
Abstract: A model based on a time‐dependent treatment of the ablation of organic polymer surfaces by UV laser radiation is proposed. It relates the dynamics of the etching process to the experimental parameters such as the fluence, wavelength, and the width of the laser pulse. The model is applied to poly(methyl methacrylate) and to polyimide in order to predict the etch characteristics quantitatively and to compare them systematically to the experimental results. This model accounts for a wide variety of observations such as fluence thresholds, wavelength‐dependent etch rates, ‘‘incubation’’ pulses, filtering by photofragments, fast intrapulse etching, thermal contributions, and even the influence of pulse compression so that a consistent picture of the mechanisms underlying the ablation process becomes apparent.
Journal ArticleDOI
Ultraviolet laser ablation of polyimide films
TL;DR: In this paper, a simple photochemical mechanism in which one photon or less (on average) is absorbed per monomer is shown to be insufficient for significant ablation at 248 nm.
Journal ArticleDOI
Excimer laser etching of polymers
TL;DR: In this article, the ablative decomposition of polyimide, poly(methylmethacrylate), and TNS2 photoresist at high excimer laser (ArF and KrF) fluences (> 1 J/cm2) is investigated.
References
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Journal ArticleDOI
Self-developing photoetching of poly(ethylene terephthalate) films by far-ultraviolet excimer laser radiation
R. Srinivasan,V. Mayne‐Banton +1 more
TL;DR: In this article, the etch rates of 1200 A/pulse of 370 mJ/cm2 were realized in air, attributed to the high absorption cross section of the films for the radiation which results in the energy being trapped in the first 2700 A, the high efficiency for bond breaking at these photon energies, and the formation of numerous small fragment molecules which promotes their volatization.
Journal ArticleDOI
Direct etching of polymeric materials using a XeCl laser
TL;DR: In this paper, the direct etching of polyethylene terephthalate (PET) film using a XeCl laser has been investigated and is shown to be consistent with a thermal model for degradation.
Journal ArticleDOI
Far-ultraviolet laser ablation of atherosclerotic lesions
TL;DR: Ultraviolet laser catheterization appears practical with respect to the availability of fiberoptic materials and high‐pulse‐rate excimer lasers, and potential clinical applications include geometrically precise removal of tissue, without thermal damage to the reamaining substrate, is desired.
Journal ArticleDOI
Theory of etching of polymers by far-ultraviolet high-intensity pulsed laser- and long-term irradiation
H. H. G. Jellinek,R. Srinivasan +1 more
TL;DR: The relation fonctionnelle entre l'epaisseur finale du trou and the fluence incidente (ou l'intensite) sur la base de la cinetique de degradation du polymere is discussed in this article.
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Self-developing photoetching of poly(ethylene terephthalate) films by far-ultraviolet excimer laser radiation
R. Srinivasan,V. Mayne‐Banton +1 more