Proceedings ArticleDOI
Coupled-Wave Analysis Of Two-Dimensional Dielectric Gratings
M. G. Moharam
- Vol. 0883, pp 8-11
TLDR
In this article, the authors analyzed the conical diffraction of two-dimensional surface-relief dielectric gratings using rigorous three-dimensional vector coupled-wave approach.Abstract:
Diffraction by two-dimensional surface-relief dielectric gratings are analyzed using rigorous three-dimensional vector coupled-wave approach. The method applies to arbitrary plane wave angle of incidence, wavelength, and polarization. In the resulting conical diffraction, the input TE and TM polarization are coupled and the diffracted orders are, in general, elliptically polarized. Diffraction characteristics of two-dimensional binary gratings are presented. Ultrahigh spatial-frequency gratings (grating period less light wavelength) are shown to exhibit polarization independent antireflection behavior (zero-reflectivity).read more
Citations
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Antireflection structured surfaces for the infrared spectral region
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100 nm period silicon antireflection structures fabricated using a porous alumina membrane mask
TL;DR: An ordered anodic porous alumina membrane has been used as a lithographic mask of SF6 fast atom beam etching to generate a 100 nm period antireflection structure on a silicon substrate.
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Optimal design for antireflective tapered two-dimensional subwavelength grating structures
TL;DR: In this article, an optimal Klopfenstein tapered 2D subwavelength grating is designed to reduce the Fresnel reflections by 20 dB over a broad band from an air-substrate (ns = 3.0) interface.
Patent
Spectroscopic scatterometer system
Yiping Xu,Ibrahim Abdulhalim +1 more
TL;DR: In this article, a rigorous model is used to calculate intensity or ellipsometric signatures of the diffracting structure of a semiconductor wafer, which is then matched with the signatures in the database to determine the grating shape parameters of the structure.
Journal ArticleDOI
High-temperature resistive surface grating for spectral control of thermal radiation
TL;DR: In this article, the spectral properties of two-dimensional W gratings were investigated to obtain high-temperature resistive selective emitters, and numerical calculations based on rigorous coupled-wave analysis were performed to determine the structural profile of gratings with good spectral selectivity.
References
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Rolf C. Enger,Steven K. Case +1 more
TL;DR: The properties of optical elements fabricated by holographically recording an ultrahigh spatial-frequency pattern in a photoresist mask followed by reactive ion etching to transfer this pattern into the surface of a quartz substrate are discussed.
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TL;DR: Using rigorous coupled-wave analysis, high spatial-frequency rectangular-groove surface-relief phase gratings are shown to be capable of exhibiting zero reflectivity, and these corrugated surfaces may act as antireflection coatings in a variety of applications.
Journal ArticleDOI
Coupled-wave theory for multiply exposed thick holographic gratings
TL;DR: In this paper, a coupled-wave analysis is given for Bragg-angle diffraction of light within a thick holographic emulsion containing two incoherently superimposed phase gratings with a common Bragg angle.