Journal ArticleDOI
Demonstration of 1 million Q -factor on microglassblown wineglass resonators with out-of-plane electrostatic transduction
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TLDR
In this article, the authors reported Q-factor over 1 million on both n = 2 wineglass modes and high-frequency symmetry (Af/f ) of 132 ppm on wafer-level microglassblown 3-D fused silica wineglass resonators at a compact size of 7mm diameter and center frequency of 105 kHz.Abstract:
In this paper, we report Q-factor over 1 million on both n = 2 wineglass modes, and high-frequency symmetry (Af/f ) of 132 ppm on wafer-level microglassblown 3-D fused silica wineglass resonators at a compact size of 7-mm diameter and center frequency of 105 kHz. In addition, we demonstrate for the first time, out-of-plane capacitive transduction on microelectromechanical systems wineglass resonators. High Q-factor is enabled by a high aspect ratio, self-aligned glassblown stem structure, careful surface treatment of the perimeter area, and low internal loss fused silica material. Electrostatic transduction is enabled by detecting the spatial deformation of the 3-D wineglass structure using a new out-of-plane electrode architecture. Out-of-plane electrode architecture enables the use of sacrificial layers to define the capacitive gaps and 10 μm capacitive gaps have been demonstrated on a 7-mm shell, resulting in over 9 pF of active capacitance within the device. Microglassblowing may enable batch-fabrication of high-performance fused silica wineglass gyroscopes at a significantly lower cost than their precision-machined macroscale counterparts.read more
Citations
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Journal ArticleDOI
Micromechanical Rate Integrating Gyroscope With Angle-Dependent Bias Compensation Using a Self-Precession Method
TL;DR: In this paper, a generalized electronic feedback method for the compensation of MEMS gyroscope damping asymmetry (anisodamping) and stiffness asymmetric (anisoelasticity) on a stand-alone digital signal processing platform is presented.
Journal ArticleDOI
Monolithic Cylindrical Fused Silica Resonators with High Q Factors
TL;DR: For the first time, a monolithic cylindrical fused silica resonator with a Q factor approaching 8 × 105 (ring-down time over 1 min) is reported and may enable high performance inertial sensing with standard manufacturing process and simple post-fabrication treatment.
Journal ArticleDOI
Fused Silica Micro Shell Resonator With T-Shape Masses for Gyroscopic Application
TL;DR: In this paper, a micro shell resonator (MSR) with T-shape masses based on fused silica using out-of-plane electrode structures is presented, and the dynamic parameters and transduction efficiency are calculated and optimized with finite element method, revealing 3.76 times increase in drive efficiency, 4.65 times improvement in detection efficiency, and 17.81 times in mechanical sensitivity.
Journal ArticleDOI
Decaying Time Constant Enhanced MEMS Disk Resonator for High Precision Gyroscopic Application
Xin Zhou,Dingbang Xiao,Qingsong Li,Zhanqiang Hou,Kaixuan He,Zhihua Chen,Yulie Wu,Xuezhong Wu +7 more
TL;DR: In this article, a new design strategy of adding lumped masses to the frame structure of a disk resonator gyroscope (DRG) to mitigate its figure of merit (FOM) was reported.
Journal ArticleDOI
An Investigation of Processes for Glass Micromachining
TL;DR: This paper presents processes for glass micromachining, including sandblast, wet etching, reactive ion etching (RIE), and glass reflow techniques, and the current challenges of these methods are addressed here.
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Type I and Type II Micromachined Vibratory Gyroscopes
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Proceedings ArticleDOI
Limits of quality factor in bulk-mode micromechanical resonators
Saurabh A. Chandorkar,Manu Agarwal,Renata Melamud,Rob N. Candler,Kenneth E. Goodson,Thomas W. Kenny +5 more
TL;DR: In this paper, the authors present the dominant energy loss mechanisms and quality factor (Q) limits in bulk mode micromechanical resonators and demonstrate that in resonators with an appropriately designed stem connection to anchor the maximum achievable Q limit is set by either Thermoelastic dissipation (TED) or the Akhieser effect (AKE).