Open Access
Design, Fabrication and Experimental-Numerical Study of PZT Sensors
Mehmet Arik,Avram Bar-Cohen,K S Yigit,S M Zurnx +3 more
- Iss: 2000, pp 574-578
Reads0
Chats0
TLDR
In this article, PZT cantilever beams have been extended to new MEMS devices; specifically reactive ion etched (RIE) bulk micromachined PZTs membranes.Abstract:
MEMS micropumps, based on PZT membranes have been designed and fabricated at the Microtechnology Laboratory of the University of Minnesota for use in fluid flow control, and as chemical and pressure sensors. Design, fabrication and numerical analyses of the PZT cantilever beams were presented at the MSM99, and are now extended to new MEMS devices; specifically reactive ion etched (RIE) bulk micromachined PZT membranes. Four major geometries including square, rectangular, circular and elliptic devices with different sizes have been successfully fabricated. The main advantage of the new devices is in providing more resonant points than the microcantilever beam, thus creating a larger working interval. Numerical studies have been carried out by using ANSYS Finite Element software. Numerical results compared well with the experimental findings.read more
Citations
More filters
Journal ArticleDOI
Enhancing the sensitivity of a mass-based piezoresistive micro-electro-mechanical systems cantilever sensor
TL;DR: In this article, a fabricated piezoresistive micro-electro-mechanical systems (MEMS) cantilever for a mass-based sensor has been carried out to enhance sensor sensitivity by introducing the stress concentration region (SCR).
Book ChapterDOI
High Sensitive Piezoresistive Cantilever MEMS Based Sensor by Introducing Stress Concentration Region (SCR)
TL;DR: High Sensitive Piezoresistive Cantilever MEMS Based Sensor by Introducing Stress Concentration Region (SCR) by introducing stress concentration Region ( SCR) is presented.
Journal ArticleDOI
Peizoresistive Mems Cantilever based Co2 Gas Sensor
S. Subhashini,A. Vimala Juliet +1 more
TL;DR: The testing results had successfully enhanced sensitivity compared to the piezoresistive MEMS cantilever without SCR when varying mass is applied, and this SCR approach appears to be suitable for enhancing the sensitivity of a massbased piezoreistive MemS cantilesver sensor.
Proceedings ArticleDOI
Bridge structure PZT thin film microtransducer with mass loading
TL;DR: In this article, a bridge structure PZT [Pb(ZrxTi1-x)O3] thin film microtransducer with proof mass was fabricated successfully at the Microtechnology Laboratory (MTL) of the University of Minnesota.
References
More filters
Journal ArticleDOI
Surface micromachining for microsensors and microactuators
TL;DR: In this paper, surface micromachining is used to fabricate beams, plates, sealed cavities, and linear and rotary bearings, with an emphasis on polysilicon microstructures.