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Flat type thick film inductive sensors

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TLDR
In this paper, two flat-type inductive sensors are described and tested for distance and profile measurement, one is a single-layer spiral and the other is a multi-layer structure consisting of ten spirals one over the other.
Abstract
Two thick film flat-type inductive sensors are described and tested for distance and profile measurement. The first one is a single-layer spiral while the second one is a multi-layer structure consisting of ten spirals one over the other. The paper describes their geometric configurations together with their simulated magnetic fields and it reports the results from the characterization test i.e. the series-equivalent circuit parameters, the sensitivity and the cross-sensitivity to temperature. An experimental analysis of the sensitivity suggests that optimized values are obtained by an appropriate choice of the working frequency. The sensors are shielded against e.m. noise coming from the nonsensitive area. Moreover, two sensors have been tested in the laboratory using the single layer as a distance sensor and the multi-layer as a transducer for the measurement of a metallic object profile. The results of the tests show a maximum sensitivity of 14 mV=mm and a resolution of 0.6mm for the single layer, while the multi layer one reconstructs the profile with an axial resolution of a few microns and a lateral resolution better than 200mm.

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References
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Journal ArticleDOI

Gravure offset printing development for fine line thick film circuits

TL;DR: In this paper, a new gravure printing plate manufacturing method with high accuracy is presented, and printing results made with the manufactured gravure and tailored inks are reported, and the first step was to evaluate the gravure manufacturing method, which is capable of producing gravures of sufficient accuracy and uniform depth.
Journal ArticleDOI

First integrated inductive proximity sensor with on-chip CMOS readout circuit and electrodeposited 1 mm flat coil

TL;DR: In this article, the first fully integrated inductive proximity sensor has been realized with a 75 nH, 1 mm side gold electrodeposited squared coil and with on-chip 1 μm CMOS readout circuit.
Journal ArticleDOI

Inductive proximity sensor with a flat coil and a new differential relaxation oscillator

TL;DR: In this paper, a flat-coil inductive proximity sensor microsystem has been realized and successfully tested, and the flat coil, made with CMOS-compatible post processes, is connected to a versatile differential relaxation oscillator electronic interface.
Journal ArticleDOI

A differential relaxation oscillator as a versatile electronic interface for sensors

TL;DR: In this article, a simple and versatile electronic interface circuit for sensors is presented, which is based on a relaxation oscillator in differential configuration, and it can be applied to resistive, capacitive and inductive sensors or detectors.
Journal ArticleDOI

The design of a proximity inductive sensor

TL;DR: In this article, the advantages of flat coil inductive proximity sensors are discussed and a discussion of the parameters that influence the sensor's performance is reported, including the shape, the target and the electronic revealing circuit.
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