Patent
High temperature tungsten etching process
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TLDR
In this article, a tungsten film can be located over a dielectric film which serves as a stop layer during the etching step, which can be pure Tungsten or silicon oxide.Abstract:
A method of etching a tungsten film, comprising the steps of supporting a semiconductor substrate having a tungsten film thereon on a substrate support in an interior of a plasma etcher, supplying process gas to the interior of the plasma etcher, energizing the process gas into a plasma state, etching the tungsten film by exposing the substrate to the plasma, and heating the substrate to a temperature of at least 100° C. during the etching step. The etching step can include a low temperature main etch below 100° C. followed by a high temperature overetch above 100° C., the process gas including a fluorine containing gas during the main etch and a chlorine containing gas during the overetch. The tungsten film can be located over a dielectric film which serves as a stop layer during the etching step. The tungsten film can be pure tungsten and the dielectric layer can be a silicon oxide film having a thickness of 200 Å or less.read more
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References
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Patent
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